Optofluidic pressure sensor based on interferometric imaging
Optics Letters, Vol. 35, Issue 21, pp. 3604-3606 (2010)
http://dx.doi.org/10.1364/OL.35.003604
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Abstract
We present a chip-scale optofluidic interferometric sensor for measuring liquid pressure based on an imaging method. The chip was constructed with a polymer by multilayer soft lithography. It consists of a flexible air gap optical cavity, which, upon illumination by monochromatic light, generates interference patterns that depend on pressure. The pressure was measured by imaging and analyzing the interference patterns. We also employed a pattern recognition algorithm that significantly simplified the calculation and enhanced the measurement reliability. This pressure sensor was demonstrated with a working range of
© 2010 Optical Society of America
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(160.5470) Materials : Polymers
(120.5475) Instrumentation, measurement, and metrology : Pressure measurement
(130.3990) Integrated optics : Micro-optical devices
ToC Category:
Integrated Optics
History
Original Manuscript: July 27, 2010
Revised Manuscript: September 22, 2010
Manuscript Accepted: September 28, 2010
Published: October 21, 2010
Citation
Wuzhou Song and Demetri Psaltis, "Optofluidic pressure sensor based on interferometric imaging," Opt. Lett. 35, 3604-3606 (2010)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-21-3604
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