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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 35, Iss. 22 — Nov. 15, 2010
  • pp: 3766–3768

Multispectral microbolometers for the midinfrared

Thomas Maier and Hubert Brueckl  »View Author Affiliations

Optics Letters, Vol. 35, Issue 22, pp. 3766-3768 (2010)

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The spectral responsivity and the dynamic behavior of microbolometers with an integrated absorbing metamaterial are investigated. Wavelength tailoring and tuning in different microbolometers are achieved by varying the lateral extension of the absorber elements. Maximum sensitivity is tuned between 2.9 and 7.7 μm , with peak absorptions reaching up to 88%. The presence of a continuous metallic shielding layer affects heat conduction and leads to faster thermal response times.

© 2010 Optical Society of America

OCIS Codes
(040.2235) Detectors : Far infrared or terahertz
(160.3918) Materials : Metamaterials
(050.6624) Diffraction and gratings : Subwavelength structures
(040.6808) Detectors : Thermal (uncooled) IR detectors, arrays and imaging

ToC Category:

Original Manuscript: June 18, 2010
Revised Manuscript: October 13, 2010
Manuscript Accepted: October 14, 2010
Published: November 4, 2010

Thomas Maier and Hubert Brueckl, "Multispectral microbolometers for the midinfrared," Opt. Lett. 35, 3766-3768 (2010)

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  1. Such a system is currently marketed by Cedip Infrared Systems, http://www.cedip-infrared.com.
  2. A. J. Syllaios and P. Chahal, “Integrated spectroscopic microbolometer with microfilter arrays,” U.S. patent 6,998,613 (February 14, 2006).
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