A laser printing technique was used to fabricate split-ring resonators (SRRs) on Si substrates for terahertz (THz) metamaterials and their resonance behavior evaluated by THz time-domain spectroscopy. The laser-printed Ag SRRs exhibited sharp edge definition and excellent thickness uniformity, which resulted in an electromagnetic response similar to that from identical Au SRR structures prepared by conventional photolithography. These results demonstrate that laser printing is a practical alternative to conventional photolithography for fabricating metamaterial structures at terahertz frequencies, since it allows their design to be easily modified and optimized.
© 2010 Optical Society of America
Original Manuscript: September 3, 2010
Manuscript Accepted: October 22, 2010
Published: November 29, 2010
Heungsoo Kim, Joseph S. Melinger, Ani Khachatrian, Nicholas A. Charipar, Raymond C. Y. Auyeung, and Alberto Piqué, "Fabrication of terahertz metamaterials by laser printing," Opt. Lett. 35, 4039-4041 (2010)