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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 35, Iss. 3 — Feb. 1, 2010
  • pp: 282–284

Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser

Fei He, Ya Cheng, Zhizhan Xu, Yang Liao, Jian Xu, Haiyi Sun, Chen Wang, Zenghui Zhou, Koji Sugioka, Katsumi Midorikawa, Yonghao Xu, and Xianfeng Chen  »View Author Affiliations


Optics Letters, Vol. 35, Issue 3, pp. 282-284 (2010)
http://dx.doi.org/10.1364/OL.35.000282


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Abstract

We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.

© 2010 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.2750) Materials : Glass and other amorphous materials
(270.4180) Quantum optics : Multiphoton processes
(350.3390) Other areas of optics : Laser materials processing

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: October 20, 2009
Revised Manuscript: December 9, 2009
Manuscript Accepted: December 14, 2009
Published: January 21, 2010

Virtual Issues
Vol. 5, Iss. 4 Virtual Journal for Biomedical Optics

Citation
Fei He, Ya Cheng, Zhizhan Xu, Yang Liao, Jian Xu, Haiyi Sun, Chen Wang, Zenghui Zhou, Koji Sugioka, Katsumi Midorikawa, Yonghao Xu, and Xianfeng Chen, "Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser," Opt. Lett. 35, 282-284 (2010)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-3-282

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