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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 35, Iss. 4 — Feb. 15, 2010
  • pp: 595–597

Polarization properties of scattered light from macrorough surfaces

Lianhua Jin, Masataka Kasahara, Bernard Gelloz, and Kuniharu Takizawa  »View Author Affiliations

Optics Letters, Vol. 35, Issue 4, pp. 595-597 (2010)

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We have characterized macrorough surfaces by measuring angle-resolved Stokes parameters of scattering. The analysis of the parameters as a function of a virtual scattering angle shows that polarization properties of the scattering in the plane of incidence display a very strong dependence on the surface roughness. The method and results of this analysis have a significant impact on the application of light scattering to the inspection and process-evaluation industry.

© 2010 Optical Society of America

OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(240.5770) Optics at surfaces : Roughness
(290.5880) Scattering : Scattering, rough surfaces
(290.5855) Scattering : Scattering, polarization
(240.2130) Optics at surfaces : Ellipsometry and polarimetry

ToC Category:

Original Manuscript: October 14, 2009
Revised Manuscript: December 8, 2009
Manuscript Accepted: December 17, 2009
Published: February 12, 2010

Lianhua Jin, Masataka Kasahara, Bernard Gelloz, and Kuniharu Takizawa, "Polarization properties of scattered light from macrorough surfaces," Opt. Lett. 35, 595-597 (2010)

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