We describe the design, fabrication, and experimental demonstration of a circular Dammann grating element generating a point-spread function of two concentric rings with equal intensity. The element was fabricated using grayscale lithography, providing a smooth and accurate phase profile. As a result, we obtained high diffraction efficiency and good uniformity between the two rings.
© 2010 Optical Society of America
Diffraction and Gratings
Original Manuscript: December 14, 2009
Revised Manuscript: February 3, 2010
Manuscript Accepted: February 3, 2010
Published: March 15, 2010
Uriel Levy, Boris Desiatov, Ilya Goykhman, Tali Nachmias, Avi Ohayon, and Sheffer E. Meltzer, "Design, fabrication, and characterization of circular Dammann gratings based on grayscale lithography," Opt. Lett. 35, 880-882 (2010)