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Design, fabrication, and characterization of circular Dammann gratings based on grayscale lithography

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Abstract

We describe the design, fabrication, and experimental demonstration of a circular Dammann grating element generating a point-spread function of two concentric rings with equal intensity. The element was fabricated using grayscale lithography, providing a smooth and accurate phase profile. As a result, we obtained high diffraction efficiency and good uniformity between the two rings.

© 2010 Optical Society of America

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