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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 35, Iss. 7 — Apr. 1, 2010
  • pp: 1013–1015

Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices

Joris Van Campenhout, William M. J. Green, Solomon Assefa, and Yurii A. Vlasov  »View Author Affiliations

Optics Letters, Vol. 35, Issue 7, pp. 1013-1015 (2010)

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We report the performance of NiSi-based heaters integrated with submicrometer silicon waveguides. The heaters were fabricated using a standard complementary metal-oxide-semiconductor (CMOS) silicidation process on a thin silicon slab laterally connected with a silicon rib waveguide. The intrinsic properties of such NiSi waveguide heaters were characterized by using them as thermo-optic phase shifters in a Mach–Zehnder interferometer. The power consumption P π for obtaining a π phase shift was measured to be as low as 20 mW, using CMOS-compatible drive voltages. The time constant of the thermo-optic response was less than 2.8 μ s . Simulations suggest that a further reduction in the power consumption P π is feasible.

© 2010 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(130.3130) Integrated optics : Integrated optics materials

ToC Category:
Integrated Optics

Original Manuscript: January 4, 2010
Revised Manuscript: February 10, 2010
Manuscript Accepted: February 14, 2010
Published: March 29, 2010

Joris Van Campenhout, William M. J. Green, Solomon Assefa, and Yurii A. Vlasov, "Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices," Opt. Lett. 35, 1013-1015 (2010)

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