Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits
Optics Letters, Vol. 35, Issue 8, pp. 1290-1292 (2010)
http://dx.doi.org/10.1364/OL.35.001290
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Abstract
We present design, fabrication, and characterization of a silicon-on-insulator grating coupler of high efficiency for coupling between a silicon nanophotonic waveguide and a single mode fiber. By utilizing the lag effect of the dry etching process, a grating coupler consisting of nonuniform grooves with different widths and depths is designed and fabricated to maximize the overlapping between the upward wave and the fiber mode. The measured waveguide-to-fiber coupling efficiency of 64% (−1.9 dB) for the transverse electric polarization is achieved by the present nonuniform grating coupler directly defined on a regular silicon-on-insulator wafer.
© 2010 Optical Society of America
OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(060.1810) Fiber optics and optical communications : Buffers, couplers, routers, switches, and multiplexers
(130.3120) Integrated optics : Integrated optics devices
ToC Category:
Integrated Optics
History
Original Manuscript: January 25, 2010
Revised Manuscript: March 12, 2010
Manuscript Accepted: March 15, 2010
Published: April 15, 2010
Citation
Yongbo Tang, Zhechao Wang, Lech Wosinski, Urban Westergren, and Sailing He, "Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits," Opt. Lett. 35, 1290-1292 (2010)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-35-8-1290
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