OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 36, Iss. 10 — May. 15, 2011
  • pp: 1860–1862

High-resolution Fresnel zone plate fabrication by achromatic spatial frequency multiplication with extreme ultraviolet radiation

Sankha Subhra Sarkar, Harun H. Solak, Menouer Saidani, Christian David, and J. Friso van der Veen  »View Author Affiliations


Optics Letters, Vol. 36, Issue 10, pp. 1860-1862 (2011)
http://dx.doi.org/10.1364/OL.36.001860


View Full Text Article

Enhanced HTML    Acrobat PDF (424 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We used an approach based on the self-imaging property of gratings to fabricate high-resolution Fresnel zone plates (FZPs). Under certain conditions, the illumination of a parent ZP with a wideband EUV beam produces a radially oscillating intensity distribution with double the spatial frequency of the ZP. This intensity distribution is observed in a certain distance range, given by the local zone width, the focal length of the ZP, and the spectral bandwidth of the illuminating beam. This phenomenon has been used to lithographically record daughter ZPs that have approximately half the zone width, thus twice the resolution, of the parent ZP. FZPs with zone widths as low as 30 nm have been fabricated in this way. Use of this technique in the extreme ultraviolet (EUV) region has the potential for high throughput production of FZPs and similar high-resolution diffraction optics with variable spatial frequency for the EUV and x-ray regions.

© 2011 Optical Society of America

OCIS Codes
(090.1970) Holography : Diffractive optics
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(050.1965) Diffraction and gratings : Diffractive lenses

ToC Category:
X-ray Optics

History
Original Manuscript: March 14, 2011
Revised Manuscript: April 16, 2011
Manuscript Accepted: April 18, 2011
Published: May 9, 2011

Citation
Sankha Subhra Sarkar, Harun H. Solak, Menouer Saidani, Christian David, and J. Friso van der Veen, "High-resolution Fresnel zone plate fabrication by achromatic spatial frequency multiplication with extreme ultraviolet radiation," Opt. Lett. 36, 1860-1862 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-10-1860


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. A. V. Baez, J. Opt. Soc. Am. 51, 405 (1961). [CrossRef]
  2. J. Kirz, C. Jacobsen, and M. Howells, Q. Rev. Biophys. 28, 33 (1995). [CrossRef] [PubMed]
  3. J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maassdorf, M. Ritala, and C. David, Ultramicroscopy 109, 1360 (2009). [CrossRef] [PubMed]
  4. V. Auzelyte, C. Dais, P. Farquet, D. Grützmacher, L. J. Heyderman, F. Luo, S. Olliges, C. Padeste, P. K. Sahoo, T. Thomson, A. Turchanin, C. David, and H. H. Solak, J. Microlithogr., Microfabr., Microsyst. 8, 021204 (2009).
  5. H. H. Solak and Y. Ekinci, J. Vac. Sci. Technol. B 23, 2705 (2005). [CrossRef]
  6. J. W. Goodman, Introduction to Fourier Optics (Roberts & Co., 2005) pp. 55–58.
  7. M. Saidani and H. H. Solak, Microelectron. Eng. 86, 483 (2009). [CrossRef]
  8. J. K. W. Yang and K. K. Berggren, J. Vac. Sci. Technol. B 25, 2025 (2007). [CrossRef]
  9. H. H. Solak, C. David, and J. Gobrecht, Appl. Phys. Lett. 85, 2700 (2004). [CrossRef]
  10. S. S. Sarkar, H. H. Solak, J. Raabe, C. David, and J. F. van der Veen, Microelectron. Eng. 87, 854 (2010). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited