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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 36, Iss. 12 — Jun. 15, 2011
  • pp: 2302–2304

Addressable microlens array for parallel laser microfabrication

Patrick S. Salter and Martin J. Booth  »View Author Affiliations

Optics Letters, Vol. 36, Issue 12, pp. 2302-2304 (2011)

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Parallel processing in femtosecond-laser-based microfabrication is demonstrated using a microlens array in conjunction with a liquid-crystal spatial light modulator (SLM). A portion of the SLM is mapped onto each individual lenslet in the array and can be used to effectively switch foci on and off for fabrication. In addition, the technique allows for homogenizing the intensity of the array of foci and translating spots relative to their natural focus. The technique demonstrates the potential for high efficiency processing of aperiodic structures.

© 2011 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(190.4180) Nonlinear optics : Multiphoton processes
(220.4000) Optical design and fabrication : Microstructure fabrication
(070.6120) Fourier optics and signal processing : Spatial light modulators

ToC Category:
Optical Design and Fabrication

Original Manuscript: March 23, 2011
Revised Manuscript: May 10, 2011
Manuscript Accepted: May 17, 2011
Published: June 14, 2011

Patrick S. Salter and Martin J. Booth, "Addressable microlens array for parallel laser microfabrication," Opt. Lett. 36, 2302-2304 (2011)

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