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Addressable microlens array for parallel laser microfabrication |
Optics Letters, Vol. 36, Issue 12, pp. 2302-2304 (2011)
http://dx.doi.org/10.1364/OL.36.002302
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Abstract
Parallel processing in femtosecond-laser-based microfabrication is demonstrated using a microlens array in conjunction with a liquid-crystal spatial light modulator (SLM). A portion of the SLM is mapped onto each individual lenslet in the array and can be used to effectively switch foci on and off for fabrication. In addition, the technique allows for homogenizing the intensity of the array of foci and translating spots relative to their natural focus. The technique demonstrates the potential for high efficiency processing of aperiodic structures.
© 2011 Optical Society of America
OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(190.4180) Nonlinear optics : Multiphoton processes
(220.4000) Optical design and fabrication : Microstructure fabrication
(070.6120) Fourier optics and signal processing : Spatial light modulators
ToC Category:
Optical Design and Fabrication
History
Original Manuscript: March 23, 2011
Revised Manuscript: May 10, 2011
Manuscript Accepted: May 17, 2011
Published: June 14, 2011
Citation
Patrick S. Salter and Martin J. Booth, "Addressable microlens array for parallel laser microfabrication," Opt. Lett. 36, 2302-2304 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-12-2302
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