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Optics Letters

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  • Editor: Alan E. Willner
  • Vol. 36, Iss. 13 — Jul. 1, 2011
  • pp: 2495–2497

Three-dimensional holographic lithography by an iterative algorithm

Joshua J. Cowling, Gavin L. Williams, Alan Purvis, Richard McWilliam, Jose J. Toriz-Garcia, Nicholas L. Seed, Florian B. Soulard, and Peter A. Ivey  »View Author Affiliations


Optics Letters, Vol. 36, Issue 13, pp. 2495-2497 (2011)
http://dx.doi.org/10.1364/OL.36.002495


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Abstract

We have applied an iterative algorithm for hologram design with multiple output image planes arranged in close proximity to create continuous patterns within an imaging volume. These holograms have been designed for photolithography on three-dimensional surfaces. The influence of simulated image plane separation on the final image, and its suitability for lithography, is assessed. Results are presented and the most suitable case is demonstrated experimentally.

© 2011 Optical Society of America

OCIS Codes
(090.1760) Holography : Computer holography
(110.3960) Imaging systems : Microlithography
(230.6120) Optical devices : Spatial light modulators
(110.6895) Imaging systems : Three-dimensional lithography

ToC Category:
Holography

History
Original Manuscript: March 16, 2011
Revised Manuscript: May 19, 2011
Manuscript Accepted: May 31, 2011
Published: June 23, 2011

Citation
Joshua J. Cowling, Gavin L. Williams, Alan Purvis, Richard McWilliam, Jose J. Toriz-Garcia, Nicholas L. Seed, Florian B. Soulard, and Peter A. Ivey, "Three-dimensional holographic lithography by an iterative algorithm," Opt. Lett. 36, 2495-2497 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-13-2495


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References

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