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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 36, Iss. 14 — Jul. 15, 2011
  • pp: 2647–2649

Single-etch grating coupler for micrometric silicon rib waveguides

C. Alonso-Ramos, A. Ortega-Moñux, L. Zavargo-Peche, R. Halir, J. de Oliva-Rubio, I. Molina-Fernández, P. Cheben, D.-X. Xu, S. Janz, N. Kim, and B. Lamontagne  »View Author Affiliations

Optics Letters, Vol. 36, Issue 14, pp. 2647-2649 (2011)

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Grating couplers are widely used as an efficient and versatile fiber–chip coupling structure in nanometric silicon wire waveguides. The implementation of efficient grating couplers in micrometric silicon-on-insulator (SOI) rib waveguides is, however, challenging, since the coupler waveguide region is multimode. Here we experimentally demonstrate grating couplers in 1.5 μm -thick SOI rib waveguides with a coupling efficiency of 2.2 dB and a 3 dB bandwidth of 40 nm . An inverse taper is used to adiabatically transform the interconnection waveguide mode to the optimum grating coupler excitation field with negligible higher order Bloch mode excitation. Couplers are fabricated in the same etch step as the waveguides using i-line stepper lithography. The benefits of wafer-scale testing and device characterization without facet preparation are thus attained at no additional cost.

© 2011 Optical Society of America

OCIS Codes
(230.1950) Optical devices : Diffraction gratings
(230.3120) Optical devices : Integrated optics devices
(230.7390) Optical devices : Waveguides, planar

ToC Category:
Optical Devices

Original Manuscript: May 10, 2011
Revised Manuscript: June 13, 2011
Manuscript Accepted: June 15, 2011
Published: July 13, 2011

C. Alonso-Ramos, A. Ortega-Moñux, L. Zavargo-Peche, R. Halir, J. de Oliva-Rubio, I. Molina-Fernández, P. Cheben, D.-X. Xu, S. Janz, N. Kim, and B. Lamontagne, "Single-etch grating coupler for micrometric silicon rib waveguides," Opt. Lett. 36, 2647-2649 (2011)

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