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Electric-field-driven nano-oxidation trimming of silicon microrings and interferometers |
Optics Letters, Vol. 36, Issue 14, pp. 2668-2670 (2011)
http://dx.doi.org/10.1364/OL.36.002668
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Abstract
Nanoscale disorder results in severe spectral misalignment of silicon microring resonators and Mach–Zehnder interferometers. We correct for such effects using electric-field-induced waveguide nano-oxidation, demonstrating a tuning wavelength range of several nanometers and
© 2011 Optical Society of America
OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.0230) Optical devices : Optical devices
(230.4000) Optical devices : Microstructure fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication
ToC Category:
Optical Devices
History
Original Manuscript: May 18, 2011
Revised Manuscript: June 15, 2011
Manuscript Accepted: June 16, 2011
Published: July 13, 2011
Citation
Yiran Shen, Ivan B. Divliansky, Dimitri N. Basov, and Shayan Mookherjea, "Electric-field-driven nano-oxidation trimming of silicon microrings and interferometers," Opt. Lett. 36, 2668-2670 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-14-2668
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