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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 36, Iss. 14 — Jul. 15, 2011
  • pp: 2668–2670

Electric-field-driven nano-oxidation trimming of silicon microrings and interferometers

Yiran Shen, Ivan B. Divliansky, Dimitri N. Basov, and Shayan Mookherjea  »View Author Affiliations

Optics Letters, Vol. 36, Issue 14, pp. 2668-2670 (2011)

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Nanoscale disorder results in severe spectral misalignment of silicon microring resonators and Mach–Zehnder interferometers. We correct for such effects using electric-field-induced waveguide nano-oxidation, demonstrating a tuning wavelength range of several nanometers and 0.002 nm resolution without line shape degradation. Field- induced nano-oxidation is a permanent and precise technique and requires no new materials or high-temperature processing.

© 2011 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.0230) Optical devices : Optical devices
(230.4000) Optical devices : Microstructure fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Optical Devices

Original Manuscript: May 18, 2011
Revised Manuscript: June 15, 2011
Manuscript Accepted: June 16, 2011
Published: July 13, 2011

Yiran Shen, Ivan B. Divliansky, Dimitri N. Basov, and Shayan Mookherjea, "Electric-field-driven nano-oxidation trimming of silicon microrings and interferometers," Opt. Lett. 36, 2668-2670 (2011)

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