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Top-down approach to fiber-top cantilevers |
Optics Letters, Vol. 36, Issue 15, pp. 2898-2900 (2011)
http://dx.doi.org/10.1364/OL.36.002898
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Abstract
Taking inspiration from conventional top-down micromachining techniques, we have fabricated a low mass gold fiber-top cantilever via align-and-shine photolithography. The cantilever is characterized by measuring its resonance frequency and mechanical quality factor. Our results show that the device grants mass sensitivity comparable to that reported for similar standard cantilevers. This proof-of-concept paves the way to series production of highly sensitive fiber-top devices for remote detection of biochemical substances.
© 2011 Optical Society of America
OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(220.3740) Optical design and fabrication : Lithography
(220.4880) Optical design and fabrication : Optomechanics
(130.3990) Integrated optics : Micro-optical devices
ToC Category:
Optical Devices
History
Original Manuscript: May 12, 2011
Revised Manuscript: June 27, 2011
Manuscript Accepted: July 6, 2011
Published: July 27, 2011
Citation
Khashayar Babaei Gavan, Jan H. Rector, Kier Heeck, Dhwajal Chavan, Grzegorz Gruca, Tjerk H. Oosterkamp, and Davide Iannuzzi, "Top-down approach to fiber-top cantilevers," Opt. Lett. 36, 2898-2900 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-15-2898
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