Abstract
The feasibility of all-telluride integrated optics devices based on waveguides presenting a single-mode behavior in the spectral range () is demonstrated. These waveguides are constituted of a several micrometer thick film deposited onto a bulk glass substrate by thermal coevaporation and further etched by reactive ion etching under the atmosphere. The obtained structures were proven to behave as channel waveguides with a good single-mode transmission over the whole spectral range. These results allowed validating our technological solution for the fabrication of integrated optics modal filters for spatial interferometry.
© 2011 Optical Society of America
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