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Optics Letters

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  • Vol. 36, Iss. 15 — Aug. 1, 2011
  • pp: 2922–2924

Realization of single-mode telluride rib waveguides for mid-IR applications between 10 and 20 μm

Caroline Vigreux, Eléonore Barthélémy, Lionel Bastard, Jean-Emmanuel Broquin, Marc Barillot, Stéphane Ménard, Gilles Parent, and Annie Pradel  »View Author Affiliations


Optics Letters, Vol. 36, Issue 15, pp. 2922-2924 (2011)
http://dx.doi.org/10.1364/OL.36.002922


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Abstract

The feasibility of all-telluride integrated optics devices based on waveguides presenting a single-mode behavior in the spectral range ( 10 20 μm ) is demonstrated. These waveguides are constituted of a several micrometer thick Te 82 Ge 18 film deposited onto a Te 75 Ge 15 Ga 10 bulk glass substrate by thermal coevaporation and further etched by reactive ion etching under the CHF 3 / O 2 / Ar atmosphere. The obtained structures were proven to behave as channel waveguides with a good single-mode transmission over the whole spectral range. These results allowed validating our technological solution for the fabrication of integrated optics modal filters for spatial interferometry.

© 2011 Optical Society of America

OCIS Codes
(130.3060) Integrated optics : Infrared
(160.3130) Materials : Integrated optics materials
(130.2755) Integrated optics : Glass waveguides
(310.6845) Thin films : Thin film devices and applications

ToC Category:
Integrated Optics

History
Original Manuscript: May 11, 2011
Revised Manuscript: July 5, 2011
Manuscript Accepted: July 5, 2011
Published: August 1, 2011

Citation
Caroline Vigreux, Eléonore Barthélémy, Lionel Bastard, Jean-Emmanuel Broquin, Marc Barillot, Stéphane Ménard, Gilles Parent, and Annie Pradel, "Realization of single-mode telluride rib waveguides for mid-IR applications between 10 and 20 μm," Opt. Lett. 36, 2922-2924 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-15-2922


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