The feasibility of all-telluride integrated optics devices based on waveguides presenting a single-mode behavior in the spectral range ( $10–20\mathrm{\mu m}$ ) is demonstrated. These waveguides are constituted of a several micrometer thick ${\mathrm{Te}}_{82}{\mathrm{Ge}}_{18}$ film deposited onto a ${\mathrm{Te}}_{75}{\mathrm{Ge}}_{15}{\mathrm{Ga}}_{10}$ bulk glass substrate by thermal coevaporation and further etched by reactive ion etching under the ${\mathrm{CHF}}_3/{\mathrm{O}}_2/\mathrm{Ar}$ atmosphere. The obtained structures were proven to behave as channel waveguides with a good single-mode transmission over the whole spectral range. These results allowed validating our technological solution for the fabrication of integrated optics modal filters for spatial interferometry.

© 2011 Optical Society of America

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