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Low-loss plasmonic hybrid optical ridge waveguide on silicon-on-insulator substrate |
Optics Letters, Vol. 36, Issue 15, pp. 2946-2948 (2011)
http://dx.doi.org/10.1364/OL.36.002946
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Abstract
To achieve low loss and complete confinement of light, we propose and study a plasmonic hybrid optical waveguide fabricated on an silicon-on-insulator substrate. Using controlled oxidation and etching processes, a deep submicrometer Si core is fabricated based on UV photolithography patterning. The as-fabricated waveguide demonstrates a very low propagation loss of
© 2011 Optical Society of America
OCIS Codes
(130.2790) Integrated optics : Guided waves
(230.7370) Optical devices : Waveguides
(250.5403) Optoelectronics : Plasmonics
ToC Category:
Optical Devices
History
Original Manuscript: June 21, 2011
Revised Manuscript: July 6, 2011
Manuscript Accepted: July 7, 2011
Published: August 1, 2011
Citation
Xiaoliu Zuo and Zhijun Sun, "Low-loss plasmonic hybrid optical ridge waveguide on silicon-on-insulator substrate," Opt. Lett. 36, 2946-2948 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-15-2946
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