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Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide |
Optics Letters, Vol. 36, Issue 15, pp. 3003-3005 (2011)
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Abstract
We demonstrate a proof of concept of a novel and compact integrated mechano-optical sensor for
© 2011 Optical Society of America
OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(130.6010) Integrated optics : Sensors
(230.4685) Optical devices : Optical microelectromechanical devices
ToC Category:
Integrated Optics
History
Original Manuscript: June 2, 2011
Manuscript Accepted: June 25, 2011
Published: August 1, 2011
Citation
So V. Pham, Meindert Dijkstra, Henk A. G. M. van Wolferen, Markus Pollnau, Gijs J. M. Krijnen, and Hugo J. W. M. Hoekstra, "Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide," Opt. Lett. 36, 3003-3005 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-15-3003
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