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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 36, Iss. 15 — Aug. 1, 2011
  • pp: 3003–3005

Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si 3 N 4 grated waveguide

So V. Pham, Meindert Dijkstra, Henk A. G. M. van Wolferen, Markus Pollnau, Gijs J. M. Krijnen, and Hugo J. W. M. Hoekstra  »View Author Affiliations


Optics Letters, Vol. 36, Issue 15, pp. 3003-3005 (2011)


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Abstract

We demonstrate a proof of concept of a novel and compact integrated mechano-optical sensor for H 2 detection based on a microcantilever suspended above a Si 3 N 4 grated waveguide. The fabricated devices are mechanically and optically modeled and characterized. Sensing operation of the sensor is demonstrated with 1% H 2 in N 2 . The error in detection of the cantilever bending induced by absorption of H 2 is estimated to be approximately 10 nm . Significantly improved sensitivity (down to 33 pm ) is expected for reduced initial bending of the microcantilever. The simulation and experimental results are in good agreement and provide a good guideline for further optimization of the sensor.

© 2011 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(130.6010) Integrated optics : Sensors
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Integrated Optics

History
Original Manuscript: June 2, 2011
Manuscript Accepted: June 25, 2011
Published: August 1, 2011

Citation
So V. Pham, Meindert Dijkstra, Henk A. G. M. van Wolferen, Markus Pollnau, Gijs J. M. Krijnen, and Hugo J. W. M. Hoekstra, "Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide," Opt. Lett. 36, 3003-3005 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-15-3003

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