OSA's Digital Library

Optics Letters

Optics Letters


  • Vol. 36, Iss. 15 — Aug. 1, 2011
  • pp: 3003–3005

Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si 3 N 4 grated waveguide

So V. Pham, Meindert Dijkstra, Henk A. G. M. van Wolferen, Markus Pollnau, Gijs J. M. Krijnen, and Hugo J. W. M. Hoekstra  »View Author Affiliations

Optics Letters, Vol. 36, Issue 15, pp. 3003-3005 (2011)

View Full Text Article

Enhanced HTML    Acrobat PDF (393 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


We demonstrate a proof of concept of a novel and compact integrated mechano-optical sensor for H 2 detection based on a microcantilever suspended above a Si 3 N 4 grated waveguide. The fabricated devices are mechanically and optically modeled and characterized. Sensing operation of the sensor is demonstrated with 1% H 2 in N 2 . The error in detection of the cantilever bending induced by absorption of H 2 is estimated to be approximately 10 nm . Significantly improved sensitivity (down to 33 pm ) is expected for reduced initial bending of the microcantilever. The simulation and experimental results are in good agreement and provide a good guideline for further optimization of the sensor.

© 2011 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(130.6010) Integrated optics : Sensors
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Integrated Optics

Original Manuscript: June 2, 2011
Manuscript Accepted: June 25, 2011
Published: August 1, 2011

So V. Pham, Meindert Dijkstra, Henk A. G. M. van Wolferen, Markus Pollnau, Gijs J. M. Krijnen, and Hugo J. W. M. Hoekstra, "Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide," Opt. Lett. 36, 3003-3005 (2011)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. M. J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization, 2nd ed. (CRC Press, 2002).
  2. M. Alvarez and L. M. Lechuga, Analyst 135, 827 (2010). [CrossRef] [PubMed]
  3. S. Okuyama, Y. Mitobe, K. Okuyama, and K. Matsushita, Jpn. J. Appl. Phys. 39, 3584 (2000). [CrossRef]
  4. D. R. Baselt, B. Fruhberger, E. Klaassen, S. Cemalovic, C. L. Britton Jr., S. V. Patel, T. E. Mlsna, D. McCorkle, and B. Warmack, Sens. Actuators B Chem. 88, 120 (2003). [CrossRef]
  5. Z. Hu, T. Thundat, and R. J. Warmack, J. Appl. Phys. 90, 427 (2001). [CrossRef]
  6. A. Loui, F. T. Goericke, T. V. Ratto, J. Lee, B. R. Hart, and W. P. King, Sens. Actuators A Phys. 147, 516 (2008). [CrossRef]
  7. K. Zinoviev, C. Dominguez, J. A. Plaza, V. J. C. Busto, and L. M. Lechuga, J. Lightwave Technol. 24, 2132 (2006). [CrossRef]
  8. M. Nordstrom, D. A. Zauner, M. Calleja, J. Hubner, and A. Boisen, Appl. Phys. Lett. 91, 103512 (2007). [CrossRef]
  9. J. W. Noh, R. Anderson, S. Kim, J. Cardenas, and G. Nordin, Opt. Express 16, 12114 (2008). [CrossRef] [PubMed]
  10. S. T. Koev, R. Fernandes, W. E. Bentley, and R. Ghodssi, IEEE Trans. Biomed. Circuits Syst. 3, 415 (2009). [CrossRef]
  11. L. J. Kauppinen, H. J. W. M. Hoekstra, M. Dijkstra, R. M. de Ridder, and G. J. M. Krijnen, Proceedings of the 14th European Conference on Integrated Optics (Eindhoven University of Technology, 2008), pp. 111–114.
  12. S. V. Pham, L. J. Kauppinen, M. Dijkstra, H. A. G. M. van Wolferen, R. M. de Ridder, and H. J. W. M. Hoekstra, IEEE Photon. Technol. Lett. 23, 215 (2011). [CrossRef]
  13. Z. H. Chen, J. S. Jie, L. B. Luo, H. Wang, C. S. Lee, and S. T. Lee, Nanotech. Precis. Eng. 18, 345502 (2007).
  14. M. D. Nguyen, H. Nazeer, K. Karakaya, S. V. Pham, R. Steenwelle, M. Dekkers, L. Abelmann, D. H. A. Blank, and G. Rijnders, J. Micromech. Microeng. 20, 085022(2010). [CrossRef]
  15. M. Calleja, J. Tamayo, M. Nordström, and A. Boisen, Appl. Phys. Lett. 88, 113901 (2006). [CrossRef]
  16. J. M. Gere and S. P. Timoshenko, Mechanics of Materials, 4th SI ed. (Stanley Thornes, 1999).
  17. Intellisuite software, http://www.intellisense.com/.

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3
Fig. 4

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited