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Tunable two-mirror interference lithography system for wafer-scale nanopatterning |
Optics Letters, Vol. 36, Issue 16, pp. 3176-3178 (2011)
http://dx.doi.org/10.1364/OL.36.003176
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Abstract
We have designed and analyzed a novel (to the best of our knowledge) two-beam interference lithography system for large-area (wafer-level) nanopatterning with enhanced tunability of pattern periodicities. The tunable feature has been achieved by placing two rotational mirrors in the expanded beam paths at regulated angles for a desired period. Theoretical analyses show that the effective pattern coverage area greater than a
© 2011 Optical Society of America
OCIS Codes
(090.2880) Holography : Holographic interferometry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(220.3740) Optical design and fabrication : Lithography
(260.3160) Physical optics : Interference
(220.4241) Optical design and fabrication : Nanostructure fabrication
ToC Category:
Optical Design and Fabrication
History
Original Manuscript: May 17, 2011
Revised Manuscript: July 7, 2011
Manuscript Accepted: July 18, 2011
Published: August 11, 2011
Citation
Weidong Mao, Ishan Wathuthanthri, and Chang-Hwan Choi, "Tunable two-mirror interference lithography system for wafer-scale nanopatterning," Opt. Lett. 36, 3176-3178 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-16-3176
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