OSA's Digital Library

Optics Letters

Optics Letters


  • Vol. 36, Iss. 16 — Aug. 15, 2011
  • pp: 3269–3271

Multilayer thin-film inspection through measurements of reflection coefficients

Kai Wu, Cheng-Chung Lee, Neal J. Brock, and Brad Kimbrough  »View Author Affiliations

Optics Letters, Vol. 36, Issue 16, pp. 3269-3271 (2011)

View Full Text Article

Enhanced HTML    Acrobat PDF (234 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A vibration-insensitive interferometer is described to measure the thickness, refraction index and surface profile of thin-film stack at normal incidence. By satisfying the continuous boundary conditions of electric and magnetic fields at interfaces in a multilayer film stack, the reflection coefficient phase of the thin-film stack can be distinguished from the phase of spatial path difference, thus thickness and refraction index can be extracted. The experiment results showed that the measurement precision is significantly increased after the phase analysis was added into the reflectance analysis.

© 2011 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(310.1620) Thin films : Interference coatings
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: June 17, 2011
Revised Manuscript: July 10, 2011
Manuscript Accepted: July 11, 2011
Published: August 15, 2011

Kai Wu, Cheng-Chung Lee, Neal J. Brock, and Brad Kimbrough, "Multilayer thin-film inspection through measurements of reflection coefficients," Opt. Lett. 36, 3269-3271 (2011)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. K. P. Vitaly, F. V. Valery, and H. Vitali, Appl. Opt. 45, 4547 (2006). [CrossRef]
  2. S. W. Kim and G. H. Kim, Appl. Opt. 38, 5968 (1999). [CrossRef]
  3. D. S. Kim, S. H. Kim, H. J. Kong, and Y. W. Lee, Opt. Lett. 27, 1893 (2002). [CrossRef]
  4. Y. S. Ghim and S. W. Kim, Appl. Phys. Lett. 91, 091903 (2007). [CrossRef]
  5. Y. S. Ghim and S. W. Kim, Appl. Opt. 48, 799 (2009). [CrossRef] [PubMed]
  6. N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5875, 58750F (2005). [CrossRef]
  7. J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, Proc. SPIE 5856, 14 (2005). [CrossRef]
  8. H. A. Macleod, Thin Film Optical Filters, 3rd ed. (Institute of Physics Publishing, 2001). [CrossRef]
  9. C. C. Lee, C. L. Tien, W. S. Sheu, and C. C. Jaing, Rev. Sci. Instrum. 72, 2128 (2001). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited