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Micromirror with large-tilting angle using Fe-based metallic glass |
Optics Letters, Vol. 36, Issue 17, pp. 3464-3466 (2011)
http://dx.doi.org/10.1364/OL.36.003464
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Abstract
For enhancing the micromirror properties like tilting angle and stability during actuation, Fe-based metallic glass (MG) was applied for torsion bar material. A micromirror with mirror-plate diameter of
© 2011 Optical Society of America
OCIS Codes
(120.5800) Instrumentation, measurement, and metrology : Scanners
(230.4000) Optical devices : Microstructure fabrication
(160.3918) Materials : Metamaterials
ToC Category:
Optical Devices
History
Original Manuscript: May 16, 2011
Revised Manuscript: June 14, 2011
Manuscript Accepted: July 4, 2011
Published: August 31, 2011
Citation
Jae-Wung Lee, Yu-Ching Lin, Neelam Kaushik, Parmanand Sharma, Akihiro Makino, Akihisa Inoue, Masayoshi Esashi, and Thomas Gessner, "Micromirror with large-tilting angle using Fe-based metallic glass," Opt. Lett. 36, 3464-3466 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-17-3464
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