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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 36, Iss. 19 — Oct. 1, 2011
  • pp: 3930–3932

Subwavelength-size solid immersion lens

Myun-Sik Kim, Toralf Scharf, Mohammad Tahdiul Haq, Wataru Nakagawa, and Hans Peter Herzig  »View Author Affiliations


Optics Letters, Vol. 36, Issue 19, pp. 3930-3932 (2011)
http://dx.doi.org/10.1364/OL.36.003930


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Abstract

We report on the fabrication and characterization of nanoscale solid immersion lenses (nano-SILs) with sizes down to a subwavelength range. Submicrometer-scale cylinders fabricated by electron-beam lithography are thermally reflowed to form a spherical shape. Subsequent soft lithography leads to nano-SILs on transparent substrates for optical characterization. The optical characterization is performed using a high-resolution interference microscope with illumination at 642 nm wavelength. The focal spots produced by the nano-SILs show both spot-size reduction and enhanced optical intensity, which are consistent with the immersion effect.

© 2011 Optical Society of America

OCIS Codes
(180.3170) Microscopy : Interference microscopy
(220.4241) Optical design and fabrication : Nanostructure fabrication
(310.6628) Thin films : Subwavelength structures, nanostructures

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: July 27, 2011
Revised Manuscript: August 25, 2011
Manuscript Accepted: September 6, 2011
Published: September 30, 2011

Citation
Myun-Sik Kim, Toralf Scharf, Mohammad Tahdiul Haq, Wataru Nakagawa, and Hans Peter Herzig, "Subwavelength-size solid immersion lens," Opt. Lett. 36, 3930-3932 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-19-3930

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