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Optics Letters

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  • Vol. 36, Iss. 2 — Jan. 15, 2011
  • pp: 118–120

Fourier analysis for rotating-element ellipsometers

Yong Jai Cho, Won Chegal, and Hyun Mo Cho  »View Author Affiliations


Optics Letters, Vol. 36, Issue 2, pp. 118-120 (2011)
http://dx.doi.org/10.1364/OL.36.000118


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Abstract

We introduce a Fourier analysis of the waveform of periodic light-irradiance variation to capture Fourier coefficients for multichannel rotating-element ellipsometers. In this analysis, the Fourier coefficients for a sample are obtained using a discrete Fourier transform on the exposures. The analysis gives a generic function that encompasses the discrete Fourier transform or the Hadamard transform, depending on the specific conditions. Unlike the Hadamard transform, a well-known data acquisition method that is used only for conventional multichannel rotating-element ellipsometers with line arrays with specific readout-mode timing, this Fourier analysis is applicable to various line arrays with either nonoverlap or overlap readout-mode timing. To assess the effects of the novel Fourier analysis, the Fourier coefficients for a sample were measured with a custom-built rotating-polarizer ellipsometer, using this Fourier analysis with various numbers of scans, integration times, and rotational speeds of the polarizer.

© 2011 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: October 11, 2010
Revised Manuscript: November 25, 2010
Manuscript Accepted: November 26, 2010
Published: January 5, 2011

Citation
Yong Jai Cho, Won Chegal, and Hyun Mo Cho, "Fourier analysis for rotating-element ellipsometers," Opt. Lett. 36, 118-120 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-2-118


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References

  1. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1987).
  2. R. W. Collins, I. An, J. Lee, and J. A. Zapien, in Handbook of Ellipsometry, H.G.Tompkins and E.A.Irene, eds. (William Andrew, 2005), pp. 481–566. [CrossRef]
  3. D. E. Aspnes, Thin Solid Films 455–456, 3 (2004). [CrossRef]
  4. I. An and R. W. Collins, Rev. Sci. Instrum. 62, 1904 (1991). [CrossRef]
  5. N. V. Nguyen, B. S. Pudliner, I. An, and R. W. Collins, J. Opt. Soc. Am. A 8, 919 (1991). [CrossRef]
  6. W. Chegal, Y. J. Cho, and H. M. Cho, Department of Convergence Technology, Korea Research Institute of Standards and Science, 1 Doryong-Dong, Yuseong-Gu, Daejeon 305-340, South Korea, are preparing a manuscript to be entitled “Source-polarization-free rotating-polarizer spectroscopic ellipsometer based on novel Fourier analysis.”
  7. B. Johs, Thin Solid Films 234, 395 (1993). [CrossRef]

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