OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 36, Iss. 2 — Jan. 15, 2011
  • pp: 163–165

SiC/W/Ir multilayer-coated grating for enhanced efficiency in 50–100 nm wavelength range in Seya–Namioka mount

Shengnan He, Ying Liu, Jingtao Zhu, Haochuan Li, Qiushi Huang, Hongjun Zhou, Tonglin Huo, Zhanshan Wang, and Shaojun Fu  »View Author Affiliations


Optics Letters, Vol. 36, Issue 2, pp. 163-165 (2011)
http://dx.doi.org/10.1364/OL.36.000163


View Full Text Article

Enhanced HTML    Acrobat PDF (367 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A broadband [ SiC / W / Ir ] 2 multilayer coating was deposited onto a diffraction grating to enhance the grating efficiency in the 50 100 nm wavelength range in a Seya–Namioka mount. The holographic ion-beam etched grating had a laminar profile with 1200 lines/mm. The coating was designed by using the subquarterwave multilayer theory. The measurement results show that the efficiency in the 1 st diffraction order is greater than 9.3% throughout the wavelength range of 50 100 nm , which is obviously higher than that of single-layer gratings with SiC, Ir, or Au coatings.

© 2011 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4140) Instrumentation, measurement, and metrology : Monochromators
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(310.3915) Thin films : Metallic, opaque, and absorbing coatings

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: October 25, 2010
Revised Manuscript: November 29, 2010
Manuscript Accepted: November 29, 2010
Published: January 7, 2011

Citation
Shengnan He, Ying Liu, Jingtao Zhu, Haochuan Li, Qiushi Huang, Hongjun Zhou, Tonglin Huo, Zhanshan Wang, and Shaojun Fu, "SiC/W/Ir multilayer-coated grating for enhanced efficiency in 50–100 nm wavelength range in Seya–Namioka mount," Opt. Lett. 36, 163-165 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-2-163


Sort:  Author  |  Year  |  Journal  |  Reset  

References

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4 Fig. 5
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited