OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 36, Iss. 2 — Jan. 15, 2011
  • pp: 214–216

Experimental requirement of the error-compensating five-frame interferogram-collecting sequence used in phase-shifting interferometry

N. Ansari and W. R. Ashurst  »View Author Affiliations


Optics Letters, Vol. 36, Issue 2, pp. 214-216 (2011)
http://dx.doi.org/10.1364/OL.36.000214


View Full Text Article

Enhanced HTML    Acrobat PDF (133 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Digital phase-shifting interferometry (PSI), a technique widely used in optical testing, requires interferograms collected at optical phase differences separated by a definite phase step. The five-frame interferogram-collecting sequence suggested by Hariharan et al. [Appl. Opt. 26, 2504 (1987)] is extremely effective in significantly reducing the errors in height profiles derived using PSI that are caused by phase-step errors. In this Letter, we report on a class of five-frame sequence that, owing to its mathematical equivalence with the one suggested by Hariharan et al. and its ease of execution, is more commonly used but is much less effective in reducing the height profile errors caused by phase-step errors.

© 2011 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.1088) Instrumentation, measurement, and metrology : Adaptive interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: July 27, 2010
Manuscript Accepted: November 6, 2010
Published: January 11, 2011

Citation
N. Ansari and W. R. Ashurst, "Experimental requirement of the error-compensating five-frame interferogram-collecting sequence used in phase-shifting interferometry," Opt. Lett. 36, 214-216 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-2-214


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. C. T. Farrell and M. A. Player, Meas. Sci. Technol. 5, 648 (1994). [CrossRef]
  2. M. B. Sinclair, M. P. de Boer, and A. D. Corwin, Appl. Opt. 44, 7714 (2005). [CrossRef] [PubMed]
  3. K. M. Hurst, C. B. Roberts, and W. R. Ashurst, Tribol. Lett. 35, 9 (2009). [CrossRef]
  4. P. Hariharan, B. F. Oreb, and T. Eiju, Appl. Opt. 26, 2504 (1987). [CrossRef] [PubMed]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited