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Fabrication of concave microlens arrays using controllable dielectrophoretic force in template holes |
Optics Letters, Vol. 36, Issue 20, pp. 4083-4085 (2011)
http://dx.doi.org/10.1364/OL.36.004083
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Abstract
This Letter presents a method for fabricating concave microlens arrays of UV-curable polymer by using the dielectrophoresis (DEP) force. The DEP force, generated by a voltage between the patterned conductive template and substrate, acting on the polymer–air interface, can drive the dielectric liquid polymer into the template holes and change the shape of the polymer–air interface. The upper polymer surface of fabricated microlens is super smooth, which can reduce optical noise. The upper surface geometry is measured approximately as parabolic in general, which can lead to a negligible spherical aberration, compared to spherical surfaces.
© 2011 Optical Society of America
OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(240.5770) Optics at surfaces : Roughness
(240.6700) Optics at surfaces : Surfaces
ToC Category:
Optics at Surfaces
History
Original Manuscript: July 11, 2011
Revised Manuscript: September 13, 2011
Manuscript Accepted: September 20, 2011
Published: October 13, 2011
Citation
Xiangming Li, Yucheng Ding, Jinyou Shao, Hongzhong Liu, and Hongmiao Tian, "Fabrication of concave microlens arrays using controllable dielectrophoretic force in template holes," Opt. Lett. 36, 4083-4085 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-20-4083
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