OSA's Digital Library

Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 36, Iss. 21 — Nov. 1, 2011
  • pp: 4143–4145

Generation of extreme ultraviolet vortex beams using computer generated holograms

Bernd Terhalle, Andreas Langner, Birgit Päivänranta, Vitaliy A. Guzenko, Christian David, and Yasin Ekinci  »View Author Affiliations

Optics Letters, Vol. 36, Issue 21, pp. 4143-4145 (2011)

View Full Text Article

Enhanced HTML    Acrobat PDF (966 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We fabricate computer generated holograms for the generation of phase singularities at extreme ultraviolet (EUV) wavelengths using electron beam lithography and demonstrate their ability to generate optical vortices in the nonzero diffraction orders. To this end, we observe the characteristic intensity distribution of the vortex beam and verify the helical phase structure interferometrically. The presented method forms the basis for further studies on singular light fields in the EUV frequency range, i.e., in EUV interference lithography. Since the method is purely achromatic, it may also find applications in various fields of x ray optics.

© 2011 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(260.7200) Physical optics : Ultraviolet, extreme
(050.4865) Diffraction and gratings : Optical vortices
(260.6042) Physical optics : Singular optics
(260.6048) Physical optics : Soft x-rays

ToC Category:

Original Manuscript: August 9, 2011
Revised Manuscript: September 21, 2011
Manuscript Accepted: September 21, 2011
Published: October 19, 2011

Bernd Terhalle, Andreas Langner, Birgit Päivänranta, Vitaliy A. Guzenko, Christian David, and Yasin Ekinci, "Generation of extreme ultraviolet vortex beams using computer generated holograms," Opt. Lett. 36, 4143-4145 (2011)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. J. F. Nye and M. V. Berry, Proc. R. Soc. Lond. A 336, 165 (1974). [CrossRef]
  2. A. S. Desyatnikov, Yu. S. Kivshar, and L. Torner, in Progress in Optics, E.Wolf, ed. (Elsevier, 2005).
  3. D. G. Grier, Nature 424, 810 (2003). [CrossRef] [PubMed]
  4. V. G. Shvedov, A. V. Rode, Y. V. Izdebskaya, A. S. Desyatnikov, W. Krolikowski, and Y. S. Kivshar, Phys. Rev. Lett. 105, 118103 (2010). [CrossRef] [PubMed]
  5. G. Molina Terriza, J. P. Torres, and L. Torner, Nat. Phys. 3, 305 (2007). [CrossRef]
  6. S. Furhapter, A. Jesacher, S. Bernet, and M. Ritsch Marte, Opt. Lett. 30, 1953 (2005). [CrossRef] [PubMed]
  7. T. F. Scott, B. A. Kowalski, A. C. Sullivan, C. N. Bowman, and R. R. McLeod, Science 324, 913 (2009). [CrossRef] [PubMed]
  8. A. G. Peele, P. J. McMahon, D. Paterson, C. Q. Tran, A. P. Mancuso, K. A. Nugent, J. P. Hayes, E. Harvey, B. Lai, and I. McNulty, Opt. Lett. 27, 1752 (2002). [CrossRef]
  9. N. R. Heckenberg, R. McDuff, C. P. Smith, and A. G. White, Opt. Lett. 17, 221 (1992). [CrossRef] [PubMed]
  10. Z. Guo, S. Qu, and S. Liu, Opt. Commun. 273, 286 (2007). [CrossRef]
  11. E. R. Dufresne, G. C. Spalding, M. T. Dearing, and S. A. Sheets, Rev. Sci. Instrum. 72, 1810 (2001). [CrossRef]
  12. H. H. Solak, J. Phys. D 39, R171 (2006). [CrossRef]
  13. L. Allen, M. W. Beijersbergen, R. J. C. Spreeuw, and J. P. Woerdman, Phys. Rev. A 45, 8185 (1992). [CrossRef] [PubMed]
  14. A. Alexandrescu, D. Cojoc, and E. Di Fabrizio, Phys. Rev. Lett. 96, 243001 (2006). [CrossRef] [PubMed]
  15. M. van Veeneendaal and I. McNulty, Phys. Rev. Lett. 98, 157401 (2007). [CrossRef]
  16. J. Becker, P. Rose, M. Boguslawski, and C. Denz, Opt. Express 19, 9848 (2011). [CrossRef] [PubMed]
  17. S. Chavez-Cerda, G. S. McDonald, and G. H. C. New, Opt. Commun. 123, 225 (1996). [CrossRef]
  18. J. B. Pendry, Science 306, 1353 (2004). [CrossRef] [PubMed]
  19. E. Plum, J. Zhou, J. Dong, V. A. Fedotov, T. Koschny, C. M. Soukoulis, and N. I. Zheludev, Phys. Rev. B 79, 035407(2009). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited