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Optics Letters

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  • Editor: Alan E. Willner
  • Vol. 36, Iss. 23 — Dec. 1, 2011
  • pp: 4689–4691

Optical fiber probe based on spherical coupling of light energy for inner-dimension measurement of microstructures with high aspect ratios

Jiwen Cui, Lei Li, and Jiubin Tan  »View Author Affiliations


Optics Letters, Vol. 36, Issue 23, pp. 4689-4691 (2011)
http://dx.doi.org/10.1364/OL.36.004689


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Abstract

An optical fiber probe, based on spherical coupling of light energy, is proposed to transform the lateral displacement of a spherical coupler into the deflection of a light energy center, while the light energy is transmitted in the reverse direction. Therefore, the shadowing effect of a microcavity can be eliminated. The probe has a high displacement sensitivity, allowing precision inner-dimension measurements of microstructures with high aspect ratios. Measurements of microholes and fuel injection nozzles indicate that, for a microstructure with an aspect ratio of up to 15 1 , a probing force < 1 μN , a resolution of up to 0.05 μm can be achieved using the proposed probe, which is easy to exchange and low cost.

© 2011 Optical Society of America

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: August 17, 2011
Revised Manuscript: October 11, 2011
Manuscript Accepted: October 24, 2011
Published: December 1, 2011

Citation
Jiwen Cui, Lei Li, and Jiubin Tan, "Optical fiber probe based on spherical coupling of light energy for inner-dimension measurement of microstructures with high aspect ratios," Opt. Lett. 36, 4689-4691 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-23-4689


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