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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 36, Iss. 23 — Dec. 1, 2011
  • pp: 4695–4697

Femtosecond laser tuning of silicon microring resonators

Daniel Bachman, Zhijiang Chen, Ashok M. Prabhu, Robert Fedosejevs, Ying Y. Tsui, and Vien Van  »View Author Affiliations

Optics Letters, Vol. 36, Issue 23, pp. 4695-4697 (2011)

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Femtosecond laser modification is demonstrated as a possible method for postfabrication tuning of silicon microring resonators. Single 400 nm femtosecond laser pulses were used to modify the effective index of crystalline silicon microring waveguides by either amorphization or surface nanomilling depending on the laser fluence. Both blue- and redshifts in the microring resonance could be achieved without imparting significant degradation to the device quality factor.

© 2011 Optical Society of America

OCIS Codes
(230.3120) Optical devices : Integrated optics devices
(230.5750) Optical devices : Resonators

ToC Category:
Optical Devices

Original Manuscript: September 30, 2011
Revised Manuscript: November 1, 2011
Manuscript Accepted: November 1, 2011
Published: December 1, 2011

Daniel Bachman, Zhijiang Chen, Ashok M. Prabhu, Robert Fedosejevs, Ying Y. Tsui, and Vien Van, "Femtosecond laser tuning of silicon microring resonators," Opt. Lett. 36, 4695-4697 (2011)

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