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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 36, Iss. 3 — Feb. 1, 2011
  • pp: 421–423

Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities

Mughees Khan, Thomas Babinec, Murray W. McCutcheon, Parag Deotare, and Marko Lončar  »View Author Affiliations


Optics Letters, Vol. 36, Issue 3, pp. 421-423 (2011)
http://dx.doi.org/10.1364/OL.36.000421


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Abstract

We present the fabrication and characterization of high-quality-factor (Q) Si 3 N 4 photonic crystal nanobeam cavities at visible wavelengths for coupling to nitrogen-vacancy centers in a cavity QED system. Confocal microphotoluminescence analysis of the nanobeam cavities demonstrates quality factors up to Q ~ 55,000, which are limited by the resolution of our grating spectrometer. This is a 1-order-of-magnitude improvement over previous SiN x cavities at this important wavelength range. We also demonstrate coarse tuning of cavity resonances across 600 700 nm by lithographically scaling the size of fabricated devices.

© 2011 Optical Society of America

OCIS Codes
(270.0270) Quantum optics : Quantum optics
(350.4238) Other areas of optics : Nanophotonics and photonic crystals
(220.4241) Optical design and fabrication : Nanostructure fabrication
(230.5298) Optical devices : Photonic crystals

ToC Category:
Optical Devices

History
Original Manuscript: November 1, 2010
Revised Manuscript: December 16, 2010
Manuscript Accepted: December 16, 2010
Published: February 1, 2011

Citation
Mughees Khan, Thomas Babinec, Murray W. McCutcheon, Parag Deotare, and Marko Lončar, "Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities," Opt. Lett. 36, 421-423 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-3-421


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