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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 36, Iss. 5 — Mar. 1, 2011
  • pp: 612–614

MEMS accelerometer embedded in a self-mixing displacement sensor for parasitic vibration compensation

Usman Zabit, Olivier D. Bernal, Thierry Bosch, and Francis Bony  »View Author Affiliations


Optics Letters, Vol. 36, Issue 5, pp. 612-614 (2011)
http://dx.doi.org/10.1364/OL.36.000612


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Abstract

A self-mixing (SM) laser displacement sensor coupled with a microelectromechanical system (MEMS) accelerometer is presented that enables reliable displacement measurements even in the case of a nonstationary laser head. The proposed technique allows the use of SM-based sensors for embedded applications. The system resolution is currently limited to approximately 300 nm due to the noise characteristics of the currently used accelerometer. It is shown that this resolution can be greatly improved by the use of a low noise accelerometer.

© 2011 Optical Society of America

OCIS Codes
(120.0280) Instrumentation, measurement, and metrology : Remote sensing and sensors
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.7280) Instrumentation, measurement, and metrology : Vibration analysis
(280.3420) Remote sensing and sensors : Laser sensors

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: December 10, 2010
Revised Manuscript: January 24, 2011
Manuscript Accepted: January 25, 2011
Published: February 17, 2011

Citation
Usman Zabit, Olivier D. Bernal, Thierry Bosch, and Francis Bony, "MEMS accelerometer embedded in a self-mixing displacement sensor for parasitic vibration compensation," Opt. Lett. 36, 612-614 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-5-612

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