|
|
MEMS accelerometer embedded in a self-mixing displacement sensor for parasitic vibration compensation |
Optics Letters, Vol. 36, Issue 5, pp. 612-614 (2011)
http://dx.doi.org/10.1364/OL.36.000612
Enhanced HTML
Acrobat PDF (658 KB)
Abstract
A self-mixing (SM) laser displacement sensor coupled with a microelectromechanical system (MEMS) accelerometer is presented that enables reliable displacement measurements even in the case of a nonstationary laser head. The proposed technique allows the use of SM-based sensors for embedded applications. The system resolution is currently limited to approximately
© 2011 Optical Society of America
OCIS Codes
(120.0280) Instrumentation, measurement, and metrology : Remote sensing and sensors
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.7280) Instrumentation, measurement, and metrology : Vibration analysis
(280.3420) Remote sensing and sensors : Laser sensors
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: December 10, 2010
Revised Manuscript: January 24, 2011
Manuscript Accepted: January 25, 2011
Published: February 17, 2011
Citation
Usman Zabit, Olivier D. Bernal, Thierry Bosch, and Francis Bony, "MEMS accelerometer embedded in a self-mixing displacement sensor for parasitic vibration compensation," Opt. Lett. 36, 612-614 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-5-612
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription





OSA is a member of 