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Optics Letters

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  • Vol. 36, Iss. 7 — Apr. 1, 2011
  • pp: 1176–1178

Fabrication and characterization of silicon antireflection structures for infrared rays using a femtosecond laser

Hiroshi Imamoto, Shingo Kanehira, Xi Wang, Keisuke Kametani, Masaaki Sakakura, Yasuhiko Shimotsuma, Kiyotaka Miura, and Kazuyuki Hirao  »View Author Affiliations


Optics Letters, Vol. 36, Issue 7, pp. 1176-1178 (2011)
http://dx.doi.org/10.1364/OL.36.001176


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Abstract

We focus on IR sensors with lower reflection for the wavelength around 10 μm , strongly awaited for detecting human bodies. A concave structure was designed as a more suitable reflection-free structure for IR light, and an optical system with a femtosecond laser was employed for verification of the effectiveness of the structure. The microstructures prepared through this process were fabricated and optically measured using SEM, FT-IR, and Raman spectroscopy. The measurement revealed that good reflection-free structures were realized for IR sensors with lower reflection for the wavelength of around 10 μm .

© 2011 Optical Society of America

OCIS Codes
(220.4610) Optical design and fabrication : Optical fabrication
(240.5770) Optics at surfaces : Roughness
(310.1210) Thin films : Antireflection coatings
(310.6628) Thin films : Subwavelength structures, nanostructures

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: January 26, 2011
Revised Manuscript: March 6, 2011
Manuscript Accepted: March 7, 2011
Published: March 25, 2011

Virtual Issues
Vol. 6, Iss. 5 Virtual Journal for Biomedical Optics

Citation
Hiroshi Imamoto, Shingo Kanehira, Xi Wang, Keisuke Kametani, Masaaki Sakakura, Yasuhiko Shimotsuma, Kiyotaka Miura, and Kazuyuki Hirao, "Fabrication and characterization of silicon antireflection structures for infrared rays using a femtosecond laser," Opt. Lett. 36, 1176-1178 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-7-1176


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