We introduce a device based on subwavelength resonant grating technology. Using a single lithography step we built a reflective binary grating that mimics the functionality of a blazed diffraction grating in a flat geometry. We have also demonstrated that efficient subwavelength resonant devices for visible wavelengths can be built using silicon.
© 2011 Optical Society of America
Diffraction and Gratings
Original Manuscript: January 31, 2011
Revised Manuscript: March 17, 2011
Manuscript Accepted: March 19, 2011
Published: April 15, 2011
Zhen Peng, David A. Fattal, Andrei Faraon, Marco Fiorentino, Jingjing Li, and Raymond G. Beausoleil, "Reflective silicon binary diffraction grating for visible wavelengths," Opt. Lett. 36, 1515-1517 (2011)