OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 37, Iss. 1 — Jan. 1, 2012
  • pp: 13–15

Reduction of scattering loss of silicon slot waveguides by RCA smoothing

Haishan Sun, Antao Chen, Don Abeysinghe, Attila Szep, and Richard S. Kim  »View Author Affiliations


Optics Letters, Vol. 37, Issue 1, pp. 13-15 (2012)
http://dx.doi.org/10.1364/OL.37.000013


View Full Text Article

Enhanced HTML    Acrobat PDF (246 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Because of stronger optical confinement density, silicon slot waveguides tend to have higher scattering loss than normal ridge waveguides with same sidewall roughness. A wet chemical process is found to be highly effective in reducing the surface roughness and scattering loss. A reduction in scattering loss by 10.2 dB/cm for TE and 8.5 dB/cm for TM polarizations has been achieved.

© 2012 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(230.7370) Optical devices : Waveguides
(350.4238) Other areas of optics : Nanophotonics and photonic crystals

ToC Category:
Integrated Optics

History
Original Manuscript: August 9, 2011
Revised Manuscript: October 31, 2011
Manuscript Accepted: November 2, 2011
Published: December 22, 2011

Citation
Haishan Sun, Antao Chen, Don Abeysinghe, Attila Szep, and Richard S. Kim, "Reduction of scattering loss of silicon slot waveguides by RCA smoothing," Opt. Lett. 37, 13-15 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-1-13

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited