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Reduction of scattering loss of silicon slot waveguides by RCA smoothing |
Optics Letters, Vol. 37, Issue 1, pp. 13-15 (2012)
http://dx.doi.org/10.1364/OL.37.000013
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Abstract
Because of stronger optical confinement density, silicon slot waveguides tend to have higher scattering loss than normal ridge waveguides with same sidewall roughness. A wet chemical process is found to be highly effective in reducing the surface roughness and scattering loss. A reduction in scattering loss by 10.2 dB/cm for TE and 8.5 dB/cm for TM polarizations has been achieved.
© 2012 Optical Society of America
OCIS Codes
(130.0130) Integrated optics : Integrated optics
(230.7370) Optical devices : Waveguides
(350.4238) Other areas of optics : Nanophotonics and photonic crystals
ToC Category:
Integrated Optics
History
Original Manuscript: August 9, 2011
Revised Manuscript: October 31, 2011
Manuscript Accepted: November 2, 2011
Published: December 22, 2011
Citation
Haishan Sun, Antao Chen, Don Abeysinghe, Attila Szep, and Richard S. Kim, "Reduction of scattering loss of silicon slot waveguides by RCA smoothing," Opt. Lett. 37, 13-15 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-1-13
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