Abstract
Because of stronger optical confinement density, silicon slot waveguides tend to have higher scattering loss than normal ridge waveguides with same sidewall roughness. A wet chemical process is found to be highly effective in reducing the surface roughness and scattering loss. A reduction in scattering loss by 10.2 dB/cm for TE and 8.5 dB/cm for TM polarizations has been achieved.
©2012 Optical Society of America
Full Article | PDF ArticleMore Like This
Alexander Spott, Tom Baehr-Jones, Ran Ding, Yang Liu, Richard Bojko, Trevor O’Malley, Andrew Pomerene, Craig Hill, Wesley Reinhardt, and Michael Hochberg
Opt. Express 19(11) 10950-10958 (2011)
T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen
Opt. Express 19(12) 11529-11538 (2011)
Richard Wolf, Ingo Breunig, Hans Zappe, and Karsten Buse
Opt. Express 26(16) 19815-19820 (2018)