Because of stronger optical confinement density, silicon slot waveguides tend to have higher scattering loss than normal ridge waveguides with same sidewall roughness. A wet chemical process is found to be highly effective in reducing the surface roughness and scattering loss. A reduction in scattering loss by 10.2 dB/cm for TE and 8.5 dB/cm for TM polarizations has been achieved.
© 2012 Optical Society of America
Original Manuscript: August 9, 2011
Revised Manuscript: October 31, 2011
Manuscript Accepted: November 2, 2011
Published: December 22, 2011
Haishan Sun, Antao Chen, Don Abeysinghe, Attila Szep, and Richard S. Kim, "Reduction of scattering loss of silicon slot waveguides by RCA smoothing," Opt. Lett. 37, 13-15 (2012)