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Optics Letters

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  • Editor: Alan E. Willner
  • Vol. 37, Iss. 10 — May. 15, 2012
  • pp: 1628–1630

Ultra-high efficiency multilayer blazed gratings through deposition kinetic control

D. L. Voronov, E. H. Anderson, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore  »View Author Affiliations


Optics Letters, Vol. 37, Issue 10, pp. 1628-1630 (2012)
http://dx.doi.org/10.1364/OL.37.001628


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Abstract

Diffraction efficiency of multilayer-coated blazed gratings (MBG) strongly depends on the perfection of the sawtooth-shaped layers in the overall composite structure. Growth of multilayers on sawtooth substrates should be carefully optimized to reduce groove profile distortion and, at the same time, to avoid significant roughening of multilayer interfaces. In this work, we report on a way to optimize growth of sputter-deposited Mo/Si multilayers on sawtooth substrates through variation of the sputtering gas pressure. We believe a new record for diffraction efficiency of 44% was achieved for an optimized MBG with groove density of 5250lines/mm at the wavelength of 13.1 nm.

© 2012 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(230.4170) Optical devices : Multilayers
(310.1860) Thin films : Deposition and fabrication
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
Diffraction and Gratings

History
Original Manuscript: January 18, 2012
Manuscript Accepted: February 15, 2012
Published: May 7, 2012

Citation
D. L. Voronov, E. H. Anderson, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, "Ultra-high efficiency multilayer blazed gratings through deposition kinetic control," Opt. Lett. 37, 1628-1630 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-10-1628


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