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Femtosecond laser-assisted etching of three-dimensional inverted-woodpile structures in fused silica |
Optics Letters, Vol. 37, Issue 10, pp. 1682-1684 (2012)
http://dx.doi.org/10.1364/OL.37.001682
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Abstract
Three-dimensional inverted-woodpile (WP) structures were embedded in a microchannel by femtosecond laser direct-writing of fused silica followed by chemical etching with diluted hydrofluoric acid. We show the hole size is linearly dependent on laser-scanning depth for various pulse energies, permitting the control of laser exposures to facilitate close 5 µm periodic packing of uniform microcapillary arrays. Exposure compensation for depth-dependent etching rate and optical beam aberrations yielded stable and crack-free uniform inverted-WP structures. The direct formation of the inverted-WP structure together with microchannels in an all-fused silica substrate, offers chemical stability and inertness, and biocompatibility to be exploited as new microfluidic systems for chromatography and electro-osmotic pumps.
© 2012 Optical Society of America
OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4000) Optical design and fabrication : Microstructure fabrication
(320.2250) Ultrafast optics : Femtosecond phenomena
(050.5298) Diffraction and gratings : Photonic crystals
(050.6875) Diffraction and gratings : Three-dimensional fabrication
ToC Category:
Diffraction and Gratings
History
Original Manuscript: December 23, 2011
Revised Manuscript: March 20, 2012
Manuscript Accepted: March 23, 2012
Published: May 10, 2012
Citation
Stephen Ho, Moez Haque, Peter R. Herman, and J. Stewart Aitchison, "Femtosecond laser-assisted etching of three-dimensional inverted-woodpile structures in fused silica," Opt. Lett. 37, 1682-1684 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-10-1682
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