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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 37, Iss. 10 — May. 15, 2012
  • pp: 1682–1684

Femtosecond laser-assisted etching of three-dimensional inverted-woodpile structures in fused silica

Stephen Ho, Moez Haque, Peter R. Herman, and J. Stewart Aitchison  »View Author Affiliations

Optics Letters, Vol. 37, Issue 10, pp. 1682-1684 (2012)

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Three-dimensional inverted-woodpile (WP) structures were embedded in a microchannel by femtosecond laser direct-writing of fused silica followed by chemical etching with diluted hydrofluoric acid. We show the hole size is linearly dependent on laser-scanning depth for various pulse energies, permitting the control of laser exposures to facilitate close 5 µm periodic packing of uniform microcapillary arrays. Exposure compensation for depth-dependent etching rate and optical beam aberrations yielded stable and crack-free uniform inverted-WP structures. The direct formation of the inverted-WP structure together with microchannels in an all-fused silica substrate, offers chemical stability and inertness, and biocompatibility to be exploited as new microfluidic systems for chromatography and electro-osmotic pumps.

© 2012 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4000) Optical design and fabrication : Microstructure fabrication
(320.2250) Ultrafast optics : Femtosecond phenomena
(050.5298) Diffraction and gratings : Photonic crystals
(050.6875) Diffraction and gratings : Three-dimensional fabrication

ToC Category:
Diffraction and Gratings

Original Manuscript: December 23, 2011
Revised Manuscript: March 20, 2012
Manuscript Accepted: March 23, 2012
Published: May 10, 2012

Stephen Ho, Moez Haque, Peter R. Herman, and J. Stewart Aitchison, "Femtosecond laser-assisted etching of three-dimensional inverted-woodpile structures in fused silica," Opt. Lett. 37, 1682-1684 (2012)

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