OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 37, Iss. 10 — May. 15, 2012
  • pp: 1682–1684

Femtosecond laser-assisted etching of three-dimensional inverted-woodpile structures in fused silica

Stephen Ho, Moez Haque, Peter R. Herman, and J. Stewart Aitchison  »View Author Affiliations


Optics Letters, Vol. 37, Issue 10, pp. 1682-1684 (2012)
http://dx.doi.org/10.1364/OL.37.001682


View Full Text Article

Enhanced HTML    Acrobat PDF (341 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Three-dimensional inverted-woodpile (WP) structures were embedded in a microchannel by femtosecond laser direct-writing of fused silica followed by chemical etching with diluted hydrofluoric acid. We show the hole size is linearly dependent on laser-scanning depth for various pulse energies, permitting the control of laser exposures to facilitate close 5 µm periodic packing of uniform microcapillary arrays. Exposure compensation for depth-dependent etching rate and optical beam aberrations yielded stable and crack-free uniform inverted-WP structures. The direct formation of the inverted-WP structure together with microchannels in an all-fused silica substrate, offers chemical stability and inertness, and biocompatibility to be exploited as new microfluidic systems for chromatography and electro-osmotic pumps.

© 2012 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4000) Optical design and fabrication : Microstructure fabrication
(320.2250) Ultrafast optics : Femtosecond phenomena
(050.5298) Diffraction and gratings : Photonic crystals
(050.6875) Diffraction and gratings : Three-dimensional fabrication

ToC Category:
Diffraction and Gratings

History
Original Manuscript: December 23, 2011
Revised Manuscript: March 20, 2012
Manuscript Accepted: March 23, 2012
Published: May 10, 2012

Citation
Stephen Ho, Moez Haque, Peter R. Herman, and J. Stewart Aitchison, "Femtosecond laser-assisted etching of three-dimensional inverted-woodpile structures in fused silica," Opt. Lett. 37, 1682-1684 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-10-1682


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. S. John, Phys. Rev. Lett. 58, 2486 (1987). [CrossRef]
  2. E. Yablonovitch, Phys. Rev. Lett. 58, 2059 (1987). [CrossRef]
  3. J. Li, P. Herman, C. Valdivia, V. Kitaev, and G. Ozin, Opt. Express 13, 6454 (2005). [CrossRef]
  4. D. Chanda, L. E. Abolghasemi, M. Haque, M. L. Ng, and P. R. Herman, Opt. Express 16, 15402 (2008). [CrossRef]
  5. M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, Nat. Mater. 3, 444 (2004). [CrossRef]
  6. S. Wong, M. Deubel, F. Pérez-Willard, S. John, G. A. Ozin, M. Wegener, and G. von Freymann, Adv. Mater. 18, 265 (2006). [CrossRef]
  7. N. Tétreault, G. von Freymann, M. Deubel, M. Hermatschweiler, F. P. Willard, S. John, M. Wegener, and G. A. Ozin, Adv. Mater. 18, 457 (2006). [CrossRef]
  8. A. Marcinkevičius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, Opt. Lett. 26, 277 (2001). [CrossRef]
  9. Y. Bellouard, A. Said, M. Dugan, and P. Bado, Opt. Express 12, 2120 (2004). [CrossRef]
  10. R. S. Taylor, C. Hnatovsky, and E. Simova, Laser Photonics Rev. 2, 26 (2008). [CrossRef]
  11. R. Osellame, V. Maselli, R. M. Vazquez, R. Ramponi, and G. Cerullo, Appl. Phys. Lett. 90, 231118 (2007). [CrossRef]
  12. V. Maselli, J. R. Grenier, S. Ho, and P. R. Herman, Opt. Express 17, 11719 (2009). [CrossRef]
  13. S. Ho, P. R. Herman, and J. S. Aitchison, Appl. Phys. 106, 5 (2012).
  14. S. M. Eaton, M. L. Ng, R. Osellame, and P. R. Herman, J. Non-Cryst. Solids 357, 2387 (2011). [CrossRef]
  15. X. Yu, Y. Liao, F. He, B. Zeng, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, J. Appl. Phys. 109, 053114 (2011). [CrossRef]
  16. R. Osellame, V. Maselli, N. Chiodo, D. Polli, R. M. Vazquez, R. Ramponi, and G. Cerullo, Electron. Lett. 41, 315(2005). [CrossRef]
  17. G. Cerullo, R. Osellame, S. Taccheo, M. Marangoni, D. Polli, R. Ramponi, P. Laporta, and S. D. Silvestri, Opt. Lett. 27, 1938 (2002). [CrossRef]
  18. Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, Opt. Lett. 28, 55 (2003). [CrossRef]
  19. C. Hnatovsky, R. S. Taylor, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, J. Appl. Phys. 98, 013517(2005). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1. Fig. 2. Fig. 3.
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited