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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 37, Iss. 10 — May. 15, 2012
  • pp: 1745–1747

Microelectromechanical-systems-driven two-layer rotary-blade-based adjustable iris diaphragm

Guangya Zhou, Hongbin Yu, Yu Du, and Fook Siong Chau  »View Author Affiliations

Optics Letters, Vol. 37, Issue 10, pp. 1745-1747 (2012)

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We report a miniature adjustable multi-blade iris diaphragm driven by microelectromechanical-systems-based electrostatic rotary microactuators. A proof-of-concept device is designed and fabricated using a silicon-on-insulator micromachining process. The diameter of the developed iris diaphragm aperture is experimentally demonstrated to be able to adjust from 0.45 to 1.56 mm. When used in a miniature camera lens system, the current prototype device is capable of providing an adjustment range of more than three full f/stops.

© 2012 Optical Society of America

OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Optical Devices

Original Manuscript: December 8, 2011
Revised Manuscript: March 10, 2012
Manuscript Accepted: March 26, 2012
Published: May 15, 2012

Guangya Zhou, Hongbin Yu, Yu Du, and Fook Siong Chau, "Microelectromechanical-systems-driven two-layer rotary-blade-based adjustable iris diaphragm," Opt. Lett. 37, 1745-1747 (2012)

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  1. R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, J. Micromech. Microeng. 14, 1700 (2004). [CrossRef]
  2. H. Yu, G. Zhou, F. S. Chau, and F. Lee, Opt. Lett. 33, 548 (2008). [CrossRef]
  3. C. G. Tsai and J. A. Yeh, Opt. Lett. 35, 2484 (2010). [CrossRef]
  4. P. Müller, N. Spengler, H. Zappe, and W. Mönch, J. Microelectromech. Syst. 19, 1477 (2010). [CrossRef]
  5. J. Draheim, T. Burger, J. G. Korvink, and U. Wallrabe, Opt. Lett. 36, 2032 (2011). [CrossRef]
  6. W. C. Tang, T. C. H. Nguyen, M. W. Judy, and R. T. Howe, Sens. Actuators A 21/23, 328 (1990). [CrossRef]

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