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Microelectromechanical-systems-driven two-layer rotary-blade-based adjustable iris diaphragm |
Optics Letters, Vol. 37, Issue 10, pp. 1745-1747 (2012)
http://dx.doi.org/10.1364/OL.37.001745
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Abstract
We report a miniature adjustable multi-blade iris diaphragm driven by microelectromechanical-systems-based electrostatic rotary microactuators. A proof-of-concept device is designed and fabricated using a silicon-on-insulator micromachining process. The diameter of the developed iris diaphragm aperture is experimentally demonstrated to be able to adjust from 0.45 to 1.56 mm. When used in a miniature camera lens system, the current prototype device is capable of providing an adjustment range of more than three full
© 2012 Optical Society of America
OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(230.4685) Optical devices : Optical microelectromechanical devices
ToC Category:
Optical Devices
History
Original Manuscript: December 8, 2011
Revised Manuscript: March 10, 2012
Manuscript Accepted: March 26, 2012
Published: May 15, 2012
Citation
Guangya Zhou, Hongbin Yu, Yu Du, and Fook Siong Chau, "Microelectromechanical-systems-driven two-layer rotary-blade-based adjustable iris diaphragm," Opt. Lett. 37, 1745-1747 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-10-1745
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