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Microelectromechanical systems bimaterial terahertz sensor with integrated metamaterial absorber |
Optics Letters, Vol. 37, Issue 11, pp. 1886-1888 (2012)
http://dx.doi.org/10.1364/OL.37.001886
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Abstract
This Letter describes the fabrication of a microelectromechanical systems (MEMS) bimaterial terahertz (THz) sensor operating at 3.8 THz. The incident THz radiation is absorbed by a metamaterial structure integrated with the bimaterial. The absorber was designed with a resonant frequency matching the quantum cascade laser illumination source while simultaneously providing structural support, desired thermomechanical properties and optical readout access. Measurement showed that the fabricated absorber has nearly 90% absorption at 3.8 THz. A responsivity of
© 2012 Optical Society of America
OCIS Codes
(040.2235) Detectors : Far infrared or terahertz
(160.3918) Materials : Metamaterials
ToC Category:
Detectors
History
Original Manuscript: January 26, 2012
Revised Manuscript: February 24, 2012
Manuscript Accepted: February 27, 2012
Published: May 21, 2012
Citation
Fabio Alves, Dragoslav Grbovic, Brian Kearney, and Gamani Karunasiri, "Microelectromechanical systems bimaterial terahertz sensor with integrated metamaterial absorber," Opt. Lett. 37, 1886-1888 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-11-1886
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