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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 37, Iss. 14 — Jul. 15, 2012
  • pp: 2781–2783

High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control using femtosecond pulse trains

Lan Jiang, Pengjun Liu, Xueliang Yan, Ni Leng, Chuancai Xu, Hai Xiao, and Yongfeng Lu  »View Author Affiliations

Optics Letters, Vol. 37, Issue 14, pp. 2781-2783 (2012)

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This study proposes a rear-surface ablation enhancement approach to fabricate high-aspect-ratio microchannels by temporally shaping femtosecond laser pulse trains. In the case study of K9 glass, enhancements of up to a 56 times higher material removal rate and a three times greater maximum drilling depth are obtained by the proposed method, as compared with conventional femtosecond laser drilling at the same processing parameters. The improvements are due to the changes of photon-electron interactions by shaping femtosecond pulse train, which can effectively adjust the photon absorption and localized transient material properties by changing electron dynamics such as free electron densities.

© 2012 Optical Society of America

OCIS Codes
(140.7090) Lasers and laser optics : Ultrafast lasers
(220.4610) Optical design and fabrication : Optical fabrication

ToC Category:
Optical Design and Fabrication

Original Manuscript: March 29, 2012
Revised Manuscript: May 18, 2012
Manuscript Accepted: May 18, 2012
Published: July 3, 2012

Lan Jiang, Pengjun Liu, Xueliang Yan, Ni Leng, Chuancai Xu, Hai Xiao, and Yongfeng Lu, "High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control using femtosecond pulse trains," Opt. Lett. 37, 2781-2783 (2012)

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