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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 37, Iss. 15 — Aug. 1, 2012
  • pp: 3198–3200

Absolute surface figure testing by shift-rotation method using Zernike polynomials

Dongqi Su, Erlong Miao, Yongxin Sui, and Huaijiang Yang  »View Author Affiliations

Optics Letters, Vol. 37, Issue 15, pp. 3198-3200 (2012)

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In surface figure testing, most of them are relative tests, and the reference surface usually limits the accuracy of test results. Absolute calibration is one of the most important and efficient techniques to reach subnanometer accuracy in surface figure testing. An absolute testing method, a shift-rotation method using Zernike polynomials, is presented, which can be used to calibrate both flat and spherical surfaces (concave or convex). Calibration contains at least three position measurements: one basic position, one rotation, and one lateral shift of the test surface. Experiments show that the repeatability of this method is 0.13 nm RMS, and pixel-to-pixel comparison with the two-sphere method is 0.2 nm RMS.

© 2012 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: April 6, 2012
Revised Manuscript: May 16, 2012
Manuscript Accepted: May 17, 2012
Published: July 26, 2012

Dongqi Su, Erlong Miao, Yongxin Sui, and Huaijiang Yang, "Absolute surface figure testing by shift-rotation method using Zernike polynomials," Opt. Lett. 37, 3198-3200 (2012)

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