OSA's Digital Library

Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 37, Iss. 16 — Aug. 15, 2012
  • pp: 3300–3302

Efficient pulse amplification using a transverse-flow CO2 laser for extreme ultraviolet light source

Yoichi Tanino, Tatsuya Yamamoto, Junichi Nishimae, and Shuichi Fujikawa  »View Author Affiliations

Optics Letters, Vol. 37, Issue 16, pp. 3300-3302 (2012)

View Full Text Article

Enhanced HTML    Acrobat PDF (281 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We constructed a master oscillator power amplifier CO2 laser system using a transverse-flow, RF-pumped CW CO2 laser. We carried out an amplification test at a 100% duty cycle of pumping discharge with the electrical input for the discharge up to 60 kW. An output power of 1.90 kW was achieved at the oscillator repetition rate of 100 kHz and the optical input power of 13 W. The electrical-to-optical efficiency was 3.1%.

© 2012 Optical Society of America

OCIS Codes
(140.3470) Lasers and laser optics : Lasers, carbon dioxide
(140.3540) Lasers and laser optics : Lasers, Q-switched

ToC Category:
Lasers and Laser Optics

Original Manuscript: May 11, 2012
Revised Manuscript: July 5, 2012
Manuscript Accepted: July 8, 2012
Published: August 3, 2012

Yoichi Tanino, Tatsuya Yamamoto, Junichi Nishimae, and Shuichi Fujikawa, "Efficient pulse amplification using a transverse-flow CO2 laser for extreme ultraviolet light source," Opt. Lett. 37, 3300-3302 (2012)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. H. Tanaka, K. Akinaga, A. Takahashi, and T. Okada, Proc. SPIE 5448, 737 (2004). [CrossRef]
  2. H. Tanaka, K. Akinaga, A. Takahashi, and T. Okada, Proc. SPIE 5662, 313 (2004). [CrossRef]
  3. Y. Ueno, G. Soumagne, A. Sumitani, and A. Endo, Appl. Phys. Lett. 91, 231501 (2007). [CrossRef]
  4. J. Fujimoto, T. Ohta, K. M. Nowak, T. Suganuma, H. Kameda, M. Moriya, T. Yokoduka, K. Fujitaka, A. Sumitani, and H. Mizoguchi, Proc. SPIE 7969, 79692S (2011). [CrossRef]
  5. H. Mizoguchi, T. Abe, Y. Watanabe, T. Ishihara, T. Ohta, T. Hori, T. Yanagida, H. Nagano, T. Yabu, S. Nagai, G. Soumagne, A. Kurosu, K. M. Nowak, T. Suganuma, M. Moriya, K. Kakizaki, A. Sumitani, H. Kameda, H. Nakarai, and J. Fujimoto, Proc. SPIE 7969, 796908(2011). [CrossRef]
  6. A. E. Hill, Appl. Phys. Lett. 12, 324 (1968). [CrossRef]
  7. A. J. Beaulieu, Appl. Phys. Lett. 16, 504 (1970). [CrossRef]
  8. T. Sakai and N. Hamada, Proc. SPIE 2502, 25 (1992). [CrossRef]
  9. U. Bielesch, M. Budde, M. Fischbach, B. Freisinger, J. H. Schaefer, J. Uhlenbusch, and W. Viol, Proc. SPIE 1810, 57 (1992). [CrossRef]
  10. D. C. Brandt, I. V. Fomenkov, A. I. Ershov, W. N. Partlo, D. W. Myers, N. R. Böwering, A. N. Bykanov, G. O. Vaschenko, O. V. Khodykin, J. R. Hoffman, L. E. Vargas, R. D. Simmons, J. A. Chavez, and C. P. Chrobak, Proc. SPIE 6517, 65170Q (2007). [CrossRef]
  11. H. Hoshino, T. Suganuma, T. Asayama, K. M. Nowak, M. Moriya, T. Abe, A. Endo, and A. Sumitani, Proc. SPIE 6921, 692131 (2008). [CrossRef]
  12. A. Endo, in CO2 Laser: Optimisation and ApplicationD. C. Dumitras, ed. (InTech, 2012), pp. 163–178.
  13. K. M. Nowak, T. Ohta, J. Fujimoto, H. Mizoguchi, and A. Endo, presented at the EUVL Workshop, UCD Dublin, Ireland, 7–9November2011.
  14. T. J. Bridges and P. K. Cheo, Appl. Phys. Lett. 14, 262 (1969). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1. Fig. 2. Fig. 3.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited