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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 37, Iss. 18 — Sep. 15, 2012
  • pp: 3825–3827

Fabrication of three-dimensional helical microchannels with arbitrary length and uniform diameter inside fused silica

Shengguan He, Feng Chen, Keyin Liu, Qing Yang, Hewei Liu, Hao Bian, Xiangwei Meng, Chao Shan, Jinhai Si, Yulong Zhao, and Xun Hou  »View Author Affiliations


Optics Letters, Vol. 37, Issue 18, pp. 3825-3827 (2012)
http://dx.doi.org/10.1364/OL.37.003825


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Abstract

We demonstrate an improved femtosecond laser irradiation followed by chemical etching process to create complex three-dimensional (3D) microchannels with arbitrary length and uniform diameter inside fused silica. A segmented chemical etching method of introducing extra access ports and a secondary power compensation is presented, which enables the fabrication of uniform 3D helical microchannels with length of 1.140 cm and aspect-ratio of 522. Based on this method, a micromixer which consists of a long helical microchannel and a y-tape microchannel was created inside the fused silica. We measured the mixing properties of the micromixer by injecting the phenolphthalein and NaOH solution through the two inlets of the y-tape microchannel. A rapid and efficient mixing was achieved in the 3D micromixer at a low Reynolds number.

© 2012 Optical Society of America

OCIS Codes
(140.3330) Lasers and laser optics : Laser damage
(140.3390) Lasers and laser optics : Laser materials processing

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: June 27, 2012
Revised Manuscript: August 8, 2012
Manuscript Accepted: August 8, 2012
Published: September 11, 2012

Citation
Shengguan He, Feng Chen, Keyin Liu, Qing Yang, Hewei Liu, Hao Bian, Xiangwei Meng, Chao Shan, Jinhai Si, Yulong Zhao, and Xun Hou, "Fabrication of three-dimensional helical microchannels with arbitrary length and uniform diameter inside fused silica," Opt. Lett. 37, 3825-3827 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-18-3825


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References

  1. G. M. Whitesides, Nature 442, 368 (2006). [CrossRef]
  2. A. J. DeMello, Nature 442, 394 (2006). [CrossRef]
  3. A. P. Sudarsan and V. M. Ugaz, LAB On Chip 6, 74 (2006). [CrossRef]
  4. A. A. S. Bhagat, S. S. Kuntaegowdanahalli, and I. Papautsky, LAB On Chip 8, 1906 (2008). [CrossRef]
  5. M. J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization (CRC, 2002).
  6. Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, Opt. Lett. 26, 1912 (2001). [CrossRef]
  7. C. Li, T. Chen, J. Si, F. Chen, X. Shi, and X. Hou, J. Micromech. Microeng. 19, 125007 (2009). [CrossRef]
  8. Y. Li and S. Qu, Opt. Lett. 36, 4236 (2011). [CrossRef]
  9. Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Opt. Lett. 35, 3225 (2010). [CrossRef]
  10. Y. Liao, J. Song, E. Li, Y. Luo, Y. Shen, D. Chen, Y. Chen, Z. Xu, K. Sugioka, and K. Midorikava, LAB On Chip 12, 746 (2012). [CrossRef]
  11. R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photon. Rev. 5, 442 (2011). [CrossRef]
  12. K. C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, and R. Osellame, Opt. Express 17, 8685 (2009). [CrossRef]
  13. F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sogioka, K. Midorikawa, Y. Xu, and X. Chen, Opt. Lett 35, 282 (2010). [CrossRef]
  14. A. M. Ius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, Opt. Lett. 26, 277 (2001). [CrossRef]
  15. Y. Bellouard, A. Said, M. Dugan, and P. Bado, Opt. Express 12, 2120 (2004). [CrossRef]
  16. Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, Opt. Lett. 28, 55 (2003). [CrossRef]
  17. V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, Appl. Phys. Lett. 88, 191107 (2006). [CrossRef]
  18. R. Osellame, V. Maselli, R. M. Vazquez, R. Ramponi, and G. Cerullo, Appl. Phys. Lett. 90, 231118 (2007). [CrossRef]
  19. V. Maselli, J. R. Grenier, S. Ho, and P. R. Herman, Opt. Express 17, 11719 (2009). [CrossRef]

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