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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 37, Iss. 2 — Jan. 15, 2012
  • pp: 133–135

High-sensitivity Fabry–Perot interferometric pressure sensor based on a nanothick silver diaphragm

Feng Xu, Dongxu Ren, Xiaolong Shi, Can Li, Weiwei Lu, Lu Lu, Liang Lu, and Benli Yu  »View Author Affiliations

Optics Letters, Vol. 37, Issue 2, pp. 133-135 (2012)

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We present a fiber-optic extrinsic Fabry–Perot interferometer pressure sensor based on a nanothick silver diaphragm. The sensing diaphragm, with a thickness measured in a few hundreds of nanometers, is fabricated by the electroless plating method, which provides a simple fabrication process involving a high-quality diaphragm at a low cost. The sensor exhibits a relatively linear response within the pressure variation range of 0–50 kPa, with a high pressure sensitivity of 70.5 nm/kPa. This sensor is expected to have potential applications in the field of highly sensitive pressure sensors.

© 2012 Optical Society of America

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot

ToC Category:
Fiber Optics and Optical Communications

Original Manuscript: August 23, 2011
Revised Manuscript: October 26, 2011
Manuscript Accepted: November 18, 2011
Published: January 9, 2012

Feng Xu, Dongxu Ren, Xiaolong Shi, Can Li, Weiwei Lu, Lu Lu, Liang Lu, and Benli Yu, "High-sensitivity Fabry–Perot interferometric pressure sensor based on a nanothick silver diaphragm," Opt. Lett. 37, 133-135 (2012)

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