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High-sensitivity Fabry–Perot interferometric pressure sensor based on a nanothick silver diaphragm |
Optics Letters, Vol. 37, Issue 2, pp. 133-135 (2012)
http://dx.doi.org/10.1364/OL.37.000133
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Abstract
We present a fiber-optic extrinsic Fabry–Perot interferometer pressure sensor based on a nanothick silver diaphragm. The sensing diaphragm, with a thickness measured in a few hundreds of nanometers, is fabricated by the electroless plating method, which provides a simple fabrication process involving a high-quality diaphragm at a low cost. The sensor exhibits a relatively linear response within the pressure variation range of 0–50 kPa, with a high pressure sensitivity of 70.5 nm/kPa. This sensor is expected to have potential applications in the field of highly sensitive pressure sensors.
© 2012 Optical Society of America
OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
ToC Category:
Fiber Optics and Optical Communications
History
Original Manuscript: August 23, 2011
Revised Manuscript: October 26, 2011
Manuscript Accepted: November 18, 2011
Published: January 9, 2012
Citation
Feng Xu, Dongxu Ren, Xiaolong Shi, Can Li, Weiwei Lu, Lu Lu, Liang Lu, and Benli Yu, "High-sensitivity Fabry–Perot interferometric pressure sensor based on a nanothick silver diaphragm," Opt. Lett. 37, 133-135 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-2-133
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