We present a fiber-optic extrinsic Fabry–Perot interferometer pressure sensor based on a nanothick silver diaphragm. The sensing diaphragm, with a thickness measured in a few hundreds of nanometers, is fabricated by the electroless plating method, which provides a simple fabrication process involving a high-quality diaphragm at a low cost. The sensor exhibits a relatively linear response within the pressure variation range of 0–50 kPa, with a high pressure sensitivity of 70.5 nm/kPa. This sensor is expected to have potential applications in the field of highly sensitive pressure sensors.
© 2012 Optical Society of America
Fiber Optics and Optical Communications
Original Manuscript: August 23, 2011
Revised Manuscript: October 26, 2011
Manuscript Accepted: November 18, 2011
Published: January 9, 2012
Feng Xu, Dongxu Ren, Xiaolong Shi, Can Li, Weiwei Lu, Lu Lu, Liang Lu, and Benli Yu, "High-sensitivity Fabry–Perot interferometric pressure sensor based on a nanothick silver diaphragm," Opt. Lett. 37, 133-135 (2012)