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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 37, Iss. 2 — Jan. 15, 2012
  • pp: 157–159

Plasmonic properties of aluminum nanorings generated by double patterning

Dennis Lehr, Kay Dietrich, Christian Helgert, Thomas Käsebier, Hans-Jörg Fuchs, Andreas Tünnermann, and Ernst-Bernhard Kley  »View Author Affiliations

Optics Letters, Vol. 37, Issue 2, pp. 157-159 (2012)

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In this Letter we evaluate a technique for the efficient and flexible generation of aluminum nanorings based on double patterning and variable shaped electron beam lithography. The process is demonstrated by realizing nanorings with diameters down to 90 nm and feature sizes of 30 nm utilizing a writing speed of one ring per microsecond. Because of redepositions caused by involved etching processes, the material of the rings and, therefore, the impact on the plasmonic properties, are unknown. This issue, which is commonly encountered when metals are nanostructured, is solved by adapting a realistic simulation model that accounts for geometry details and effective material properties. Based on this model, the redepositions are quantified, the plasmonic properties are investigated, and a design tool for the very general class of nanofabrication techniques involving the etching of metals is provided.

© 2012 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(240.6680) Optics at surfaces : Surface plasmons
(260.2065) Physical optics : Effective medium theory
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Optics at Surfaces

Original Manuscript: August 29, 2011
Revised Manuscript: November 9, 2011
Manuscript Accepted: November 25, 2011
Published: January 10, 2012

Dennis Lehr, Kay Dietrich, Christian Helgert, Thomas Käsebier, Hans-Jörg Fuchs, Andreas Tünnermann, and Ernst-Bernhard Kley, "Plasmonic properties of aluminum nanorings generated by double patterning," Opt. Lett. 37, 157-159 (2012)

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