OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 37, Iss. 20 — Oct. 15, 2012
  • pp: 4200–4202

Infrared dielectric properties of low-stress silicon nitride

Giuseppe Cataldo, James A. Beall, Hsiao-Mei Cho, Brendan McAndrew, Michael D. Niemack, and Edward J. Wollack  »View Author Affiliations


Optics Letters, Vol. 37, Issue 20, pp. 4200-4202 (2012)
http://dx.doi.org/10.1364/OL.37.004200


View Full Text Article

Enhanced HTML    Acrobat PDF (246 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Silicon nitride thin films play an important role in the realization of sensors, filters, and high-performance circuits. Estimates of the dielectric function in the far- and mid-IR regime are derived from the observed transmittance spectra for a commonly employed low-stress silicon nitride formulation. The experimental, modeling, and numerical methods used to extract the dielectric parameters with an accuracy of approximately 4% are presented.

© 2012 Optical Society of America

OCIS Codes
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties
(310.6188) Thin films : Spectral properties

ToC Category:
Thin Films

History
Original Manuscript: April 26, 2012
Revised Manuscript: September 7, 2012
Manuscript Accepted: September 10, 2012
Published: October 4, 2012

Citation
Giuseppe Cataldo, James A. Beall, Hsiao-Mei Cho, Brendan McAndrew, Michael D. Niemack, and Edward J. Wollack, "Infrared dielectric properties of low-stress silicon nitride," Opt. Lett. 37, 4200-4202 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-20-4200


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. D. J. Goldie, A. V. Velichko, D. M. Glowacka, and S. Withington, Appl. Phys. 109, 084507 (2011). [CrossRef]
  2. G. Wang, V. Yefremenko, V. Novosad, A. Datesman, J. Pearson, R. Divan, C. L. Chang, L. Bleem, A. T. Crites, J. Mehl, T. Natoli, J. McMahon, J. Sayre, J. Ruhl, S. S. Meyer, and J. E. Carlstrom, IEEE Trans. Appl. Supercond. 21, 232 (2011). [CrossRef]
  3. J. M. Martinis, K. B. Cooper, R. McDermott, M. Steffen, M. Ansmann, K. D. Osborn, K. Cicak, S. Oh, D. P. Pappas, R. W. Simmonds, and C. C. Yu, Phys. Rev. Lett. 95, 210503 (2005). [CrossRef]
  4. H. Paik and K. D. Osborn, Appl. Phys. Lett. 96, 072505 (2010). [CrossRef]
  5. T. Eriksson, S. Jiang, and C. Granqvist, Appl. Opt. 24, 745 (1985). [CrossRef]
  6. E. A. Taft, J. Electrochem. Soc. 118, 1341 (1971). [CrossRef]
  7. E. D. Palik, Handbook of Optical Constants of Solids(Elsevier, 1998), Vol. 1, pp. 771–774.
  8. M. Sekimoto, H. Yoshihara, and T. Ohkubo, J. Vac. Sci. Technol. 21, 1017 (1982). [CrossRef]
  9. T. Makino, J. Electrochem. Soc. 130, 450 (1983). [CrossRef]
  10. Addison Engineering, 150 Nortech Parkway, San Jose, California 95134 (Orientation 〈100〉, Czochralski, p-type B doped, bulk resistivity <0.005  Ω cm).
  11. F. Gervais, in Infrared and Millimeter Waves, K. J. Button, ed. (Academic, 1983), Vol. 8, Part I, pp. 284–287.
  12. C. C. Kim, J. W. Garland, H. Abad, and P. M. Raccah, Phys. Rev. B 45, 11749 (1992). [CrossRef]
  13. P. Yeh, Optical Waves in Layered Media (Wiley, 1988), pp. 102–111.
  14. M. C. Biggs, in Towards Global Optimization, L. C. W. Dixon and G. P. Szergo, eds. (North-Holland, 1975), pp. 341–349.
  15. M. J. D. Powell, in Mathematical Programming: The State of the Art, A. Bachem, M. Grotschel, and B. Korte, eds. (Springer Verlag, 1983), pp. 288–311.
  16. L. D. Landau and E. M. Lifshitz, Electrodyamics of Continuous Media (Pergamon, 1960), Vol. 8, pp. 253–262.
  17. M. Mori and T. Ooura, in Applicable Analysis (World Scientific Series, 1993), Vol. 2, pp. 301–308.
  18. R. Nitsche and T. Fritz, Phys. Rev. B 70, 195432 (2004). [CrossRef]
  19. W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes—The Art of Scientific Computing (Cambridge Univ., 2007), pp. 799–806.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1. Fig. 2. Fig. 3.
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited