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Ultralow-loss silicon ring resonatorsAleksandr Biberman, Michael J. Shaw, Erman Timurdogan, Jeremy B. Wright, and Michael R. Watts »View Author Affiliations
Aleksandr Biberman,1
Michael J. Shaw,2
Erman Timurdogan,1
Jeremy B. Wright,2
and Michael R. Watts1,*
1Research Laboratory of Electronics, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA 2Sandia National Laboratories, P.O. Box 5800, Albuquerque, New Mexico 87185, USA *Corresponding author: mwatts@mit.edu |
Optics Letters, Vol. 37, Issue 20, pp. 4236-4238 (2012)
http://dx.doi.org/10.1364/OL.37.004236
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Abstract
We experimentally demonstrate silicon ring resonators with internal quality factors of
© 2012 Optical Society of America
OCIS Codes
(230.4000) Optical devices : Microstructure fabrication
(230.5750) Optical devices : Resonators
(230.7370) Optical devices : Waveguides
ToC Category:
Optical Devices
History
Original Manuscript: July 24, 2012
Revised Manuscript: September 7, 2012
Manuscript Accepted: September 10, 2012
Published: October 9, 2012
Citation
Aleksandr Biberman, Michael J. Shaw, Erman Timurdogan, Jeremy B. Wright, and Michael R. Watts, "Ultralow-loss silicon ring resonators," Opt. Lett. 37, 4236-4238 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-20-4236
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References
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- A. Biberman and K. Bergman, Rep. Prog. Phys. 75, 046402 (2012). [CrossRef]
- Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, Nature 435, 325 (2005). [CrossRef]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, Opt. Express 19, 21989 (2011). [CrossRef]
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- M. Popovíć, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, Opt. Lett. 31, 2571 (2006). [CrossRef]
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- D. Dai and J. E. Bowers, Opt. Express 19, 10940 (2011). [CrossRef]
- A. R. Johnson, Y. Okawachi, J. S. Levy, J. Cardenas, K. Saha, M. Lipson, and A. L. Gaeta, Opt. Lett. 37, 875 (2012). [CrossRef]
- W. Mathlouthi, H. Rong, and M. Paniccia, Opt. Express 16, 16735 (2008). [CrossRef]
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- H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, Nat. Photonics 6, 369 (2012). [CrossRef]
- J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, Opt. Express 19, 24090 (2011). [CrossRef]
- R. Adar, M. Serbin, and V. Mizrahi, J. Lightwave Technol. 12, 1369 (1994). [CrossRef]
- M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl, and C. T. Sullivan, Proc. SPIE 5720, 109 (2005). [CrossRef]
- A. Gondarenko, J. S. Levy, and M. Lipson, Opt. Express 17, 11366 (2009). [CrossRef]
- K. Lee, D. Lim, L. C. Kimerling, J. Shin, and F. Cerrina, Opt. Lett. 26, 1888 (2001). [CrossRef]
- F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, Proc. SPIE 6898, 68980R (2008).
- P. Dong, W. Qian, S. Liao, H. Liang, C. Kung, N. Feng, R. Shafiiha, J. Fong, D. Feng, A. Krishnamoorthy, and M. Asghari, Opt. Express 18, 14474 (2010). [CrossRef]
- W. Bogaerts and S. K. Selvaraja, IEEE Photonics J 3, 422 (2011). [CrossRef]
- M. Borselli, T. J. Johnson, and O. Painter, Opt. Express 13, 1515 (2005). [CrossRef]
- G. Li, J. Yao, H. Thacker, A. Mekis, X. Zheng, I. Shubin, Y. Luo, J.-H. Lee, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, Opt. Express 20, 12035 (2012). [CrossRef]
- R. Adar, M. Serbin, and V. Mizrahi, J. Lightwave Technol. 12, 1369 (1994). [CrossRef]
- T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kärtner, E. P. Ippen, and H. I. Smith, Nat. Photonics 1, 57 (2007). [CrossRef]
- M. Popovíć, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, Opt. Lett. 31, 2571 (2006). [CrossRef]
- A. Biberman and K. Bergman, Rep. Prog. Phys. 75, 046402 (2012). [CrossRef]
- A. Biberman and K. Bergman, Rep. Prog. Phys. 75, 046402 (2012). [CrossRef]
- W. Bogaerts and S. K. Selvaraja, IEEE Photonics J 3, 422 (2011). [CrossRef]
Bowers, J. E.
- F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, Proc. SPIE 6898, 68980R (2008).
Chen, J.
- H. Lee, T. Chen, J. Li, O. Painter, and K. J. Vahala, Nat. Commun. 3, 867 (2012). [CrossRef]
- H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, Nat. Photonics 6, 369 (2012). [CrossRef]
Dong, P.
- F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, Proc. SPIE 6898, 68980R (2008).
Guo, J.
- M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl, and C. T. Sullivan, Proc. SPIE 5720, 109 (2005). [CrossRef]
- M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl, and C. T. Sullivan, Proc. SPIE 5720, 109 (2005). [CrossRef]
- T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kärtner, E. P. Ippen, and H. I. Smith, Nat. Photonics 1, 57 (2007). [CrossRef]
- M. Popovíć, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, Opt. Lett. 31, 2571 (2006). [CrossRef]
- H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, Nat. Photonics 6, 369 (2012). [CrossRef]
- F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, Proc. SPIE 6898, 68980R (2008).
Kärtner, F. X.
- T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kärtner, E. P. Ippen, and H. I. Smith, Nat. Photonics 1, 57 (2007). [CrossRef]
- D. Ahn, C. Hong, J. Liu, W. Giziewicz, M. Beals, L. C. Kimerling, J. Michel, J. Chen, and F. X. Kärtner, Opt. Express 15, 3916 (2007). [CrossRef]
- M. Popovíć, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, Opt. Lett. 31, 2571 (2006). [CrossRef]
- F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, Proc. SPIE 6898, 68980R (2008).
- H. Lee, T. Chen, J. Li, O. Painter, and K. J. Vahala, Nat. Commun. 3, 867 (2012). [CrossRef]
- H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, Nat. Photonics 6, 369 (2012). [CrossRef]
Leinse, A.
- H. Lee, T. Chen, J. Li, O. Painter, and K. J. Vahala, Nat. Commun. 3, 867 (2012). [CrossRef]
- H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, Nat. Photonics 6, 369 (2012). [CrossRef]
Lipson, M.
- A. R. Johnson, Y. Okawachi, J. S. Levy, J. Cardenas, K. Saha, M. Lipson, and A. L. Gaeta, Opt. Lett. 37, 875 (2012). [CrossRef]
- A. Gondarenko, J. S. Levy, and M. Lipson, Opt. Express 17, 11366 (2009). [CrossRef]
- Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, Nature 435, 325 (2005). [CrossRef]
- F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, Proc. SPIE 6898, 68980R (2008).
McFaul, S.
- F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, Proc. SPIE 6898, 68980R (2008).
- R. Adar, M. Serbin, and V. Mizrahi, J. Lightwave Technol. 12, 1369 (1994). [CrossRef]
- M. R. Watts, M. J. Shaw, and G. N. Nielson, Nat. Photonics 1, 632 (2007). [CrossRef]
- H. Lee, T. Chen, J. Li, O. Painter, and K. J. Vahala, Nat. Commun. 3, 867 (2012). [CrossRef]
- H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, Nat. Photonics 6, 369 (2012). [CrossRef]
- M. Borselli, T. J. Johnson, and O. Painter, Opt. Express 13, 1515 (2005). [CrossRef]
Popovic, M. A.
- T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kärtner, E. P. Ippen, and H. I. Smith, Nat. Photonics 1, 57 (2007). [CrossRef]
- Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, Nature 435, 325 (2005). [CrossRef]
- T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kärtner, E. P. Ippen, and H. I. Smith, Nat. Photonics 1, 57 (2007). [CrossRef]
- M. Popovíć, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, Opt. Lett. 31, 2571 (2006). [CrossRef]
- F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, Proc. SPIE 6898, 68980R (2008).
Rowe, L.
- F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, Proc. SPIE 6898, 68980R (2008).
- Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, Nature 435, 325 (2005). [CrossRef]
- W. Bogaerts and S. K. Selvaraja, IEEE Photonics J 3, 422 (2011). [CrossRef]
- R. Adar, M. Serbin, and V. Mizrahi, J. Lightwave Technol. 12, 1369 (1994). [CrossRef]
- M. R. Watts, M. J. Shaw, and G. N. Nielson, Nat. Photonics 1, 632 (2007). [CrossRef]
- M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl, and C. T. Sullivan, Proc. SPIE 5720, 109 (2005). [CrossRef]
Shubin, I.
- T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kärtner, E. P. Ippen, and H. I. Smith, Nat. Photonics 1, 57 (2007). [CrossRef]
- M. Popovíć, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, Opt. Lett. 31, 2571 (2006). [CrossRef]
- T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kärtner, E. P. Ippen, and H. I. Smith, Nat. Photonics 1, 57 (2007). [CrossRef]
- M. Popovíć, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, Opt. Lett. 31, 2571 (2006). [CrossRef]
- M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl, and C. T. Sullivan, Proc. SPIE 5720, 109 (2005). [CrossRef]
- F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, Proc. SPIE 6898, 68980R (2008).
- H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, Nat. Photonics 6, 369 (2012). [CrossRef]
- H. Lee, T. Chen, J. Li, O. Painter, and K. J. Vahala, Nat. Commun. 3, 867 (2012). [CrossRef]
- M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl, and C. T. Sullivan, Proc. SPIE 5720, 109 (2005). [CrossRef]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, Opt. Express 19, 21989 (2011). [CrossRef]
- M. R. Watts, M. J. Shaw, and G. N. Nielson, Nat. Photonics 1, 632 (2007). [CrossRef]
- T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kärtner, E. P. Ippen, and H. I. Smith, Nat. Photonics 1, 57 (2007). [CrossRef]
- M. Popovíć, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, Opt. Lett. 31, 2571 (2006). [CrossRef]
- Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, Nature 435, 325 (2005). [CrossRef]
- H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, Nat. Photonics 6, 369 (2012). [CrossRef]
IEEE Photonics J
- W. Bogaerts and S. K. Selvaraja, IEEE Photonics J 3, 422 (2011). [CrossRef]
J. Lightwave Technol.
- R. Adar, M. Serbin, and V. Mizrahi, J. Lightwave Technol. 12, 1369 (1994). [CrossRef]
Nat. Commun.
- H. Lee, T. Chen, J. Li, O. Painter, and K. J. Vahala, Nat. Commun. 3, 867 (2012). [CrossRef]
Nat. Photonics
- H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, Nat. Photonics 6, 369 (2012). [CrossRef]
- M. R. Watts, M. J. Shaw, and G. N. Nielson, Nat. Photonics 1, 632 (2007). [CrossRef]
- T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kärtner, E. P. Ippen, and H. I. Smith, Nat. Photonics 1, 57 (2007). [CrossRef]
Nature
- Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, Nature 435, 325 (2005). [CrossRef]
Opt. Express
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, Opt. Express 19, 21989 (2011). [CrossRef]
- D. Ahn, C. Hong, J. Liu, W. Giziewicz, M. Beals, L. C. Kimerling, J. Michel, J. Chen, and F. X. Kärtner, Opt. Express 15, 3916 (2007). [CrossRef]
- D. Dai and J. E. Bowers, Opt. Express 19, 10940 (2011). [CrossRef]
- J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, Opt. Express 19, 24090 (2011). [CrossRef]
- A. Gondarenko, J. S. Levy, and M. Lipson, Opt. Express 17, 11366 (2009). [CrossRef]
- W. Mathlouthi, H. Rong, and M. Paniccia, Opt. Express 16, 16735 (2008). [CrossRef]
- P. Dong, W. Qian, S. Liao, H. Liang, C. Kung, N. Feng, R. Shafiiha, J. Fong, D. Feng, A. Krishnamoorthy, and M. Asghari, Opt. Express 18, 14474 (2010). [CrossRef]
- M. Borselli, T. J. Johnson, and O. Painter, Opt. Express 13, 1515 (2005). [CrossRef]
- G. Li, J. Yao, H. Thacker, A. Mekis, X. Zheng, I. Shubin, Y. Luo, J.-H. Lee, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, Opt. Express 20, 12035 (2012). [CrossRef]
Opt. Lett.
- K. Lee, D. Lim, L. C. Kimerling, J. Shin, and F. Cerrina, Opt. Lett. 26, 1888 (2001). [CrossRef]
- A. R. Johnson, Y. Okawachi, J. S. Levy, J. Cardenas, K. Saha, M. Lipson, and A. L. Gaeta, Opt. Lett. 37, 875 (2012). [CrossRef]
- M. Popovíć, T. Barwicz, M. R. Watts, P. T. Rakich, L. Socci, E. P. Ippen, F. X. Kärtner, and H. I. Smith, Opt. Lett. 31, 2571 (2006). [CrossRef]
Proc. SPIE
- F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, Proc. SPIE 6898, 68980R (2008).
- M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl, and C. T. Sullivan, Proc. SPIE 5720, 109 (2005). [CrossRef]
Rep. Prog. Phys.
- A. Biberman and K. Bergman, Rep. Prog. Phys. 75, 046402 (2012). [CrossRef]
2012, Biberman, Rep. Prog. Phys.
- A. Biberman and K. Bergman, Rep. Prog. Phys. 75, 046402 (2012). [CrossRef]
- H. Lee, T. Chen, J. Li, O. Painter, and K. J. Vahala, Nat. Commun. 3, 867 (2012). [CrossRef]
- H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, Nat. Photonics 6, 369 (2012). [CrossRef]
- W. Bogaerts and S. K. Selvaraja, IEEE Photonics J 3, 422 (2011). [CrossRef]
2011, Watts, Opt. Express
2008, Mathlouthi, Opt. Express
2008, Gardes, Proc. SPIE
- F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, Proc. SPIE 6898, 68980R (2008).
- M. R. Watts, M. J. Shaw, and G. N. Nielson, Nat. Photonics 1, 632 (2007). [CrossRef]
- T. Barwicz, M. R. Watts, M. A. Popovic, P. T. Rakich, L. Socci, F. X. Kärtner, E. P. Ippen, and H. I. Smith, Nat. Photonics 1, 57 (2007). [CrossRef]
- Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, Nature 435, 325 (2005). [CrossRef]
- M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl, and C. T. Sullivan, Proc. SPIE 5720, 109 (2005). [CrossRef]
2001, Lee, Opt. Lett.
1994, Adar, J. Lightwave Technol.
- R. Adar, M. Serbin, and V. Mizrahi, J. Lightwave Technol. 12, 1369 (1994). [CrossRef]
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