|
Grating-based at-wavelength metrology of hard x-ray reflective optics |
Optics Letters, Vol. 37, Issue 21, pp. 4464-4466 (2012)
http://dx.doi.org/10.1364/OL.37.004464
Enhanced HTML 
Acrobat PDF (299 KB)
Abstract
A mean of characterizing the tangential shape of a hard x-ray mirror is presented. Derived from a group of methods operating under visible light, its application in the x-ray domain using an x-ray absorption grating allows recovery of the mirror shape with nanometer accuracy and submillimeter spatial resolution. The method works with incoherent light, does not require any a priori information about the mirror characteristics and allows shape reconstruction of x-ray reflective optics under thermal and mechanical working conditions.
© 2012 Optical Society of America
OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(340.7470) X-ray optics : X-ray mirrors
ToC Category:
X-ray Optics
History
Original Manuscript: July 2, 2012
Revised Manuscript: August 29, 2012
Manuscript Accepted: September 20, 2012
Published: October 23, 2012
Citation
Sebastien Berujon and Eric Ziegler, "Grating-based at-wavelength metrology of hard x-ray reflective optics," Opt. Lett. 37, 4464-4466 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-21-4464
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Cancellation of laser dither modulation from optical frequency standards (OL)
- Interfacial shape and contact-angle measurement of transparent samples with confocal interference microscopy (OL)
- Improvements in the Accuracy and the Repeatability of Long Trace Profiler Measurements (AO)
- Automatic alignment of a Kirkpatrick-Baez active optic by use of a soft-x-ray Hartmann wavefront sensor (OL)
- Non-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach (OE)
Related Conference Papers
- Frequency response metrology for high-speed optical receivers
- Cubic Phase Distortion of Single Attosecond Pulses Being Reflected on Narrow Band Mo/Si Filtering Mirrors
- Ti:Sapphire Lasers for Frequency Metrology Spanning the Visible and Infrared Spectrum without Nonlinear Fiber
- Ultra-sensitive ambient trace-gas sensor using CO2 lasers and photoacoustic spectroscopy
- Agricultural ammonia sensor using diode lasers and photoacoustic spectroscopy
« Previous Article | Next Article »
OSA is a member of 