A mean of characterizing the tangential shape of a hard x-ray mirror is presented. Derived from a group of methods operating under visible light, its application in the x-ray domain using an x-ray absorption grating allows recovery of the mirror shape with nanometer accuracy and submillimeter spatial resolution. The method works with incoherent light, does not require any a priori information about the mirror characteristics and allows shape reconstruction of x-ray reflective optics under thermal and mechanical working conditions.
© 2012 Optical Society of America
Original Manuscript: July 2, 2012
Revised Manuscript: August 29, 2012
Manuscript Accepted: September 20, 2012
Published: October 23, 2012
Sebastien Berujon and Eric Ziegler, "Grating-based at-wavelength metrology of hard x-ray reflective optics," Opt. Lett. 37, 4464-4466 (2012)