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High dynamic range microscope infrared imaging of silicon nanophotonic devices

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Abstract

A noninvasive diagnostic technique based on wavelength-resolved and magnified infrared images of weakly scattered light from a silicon photonic device may be useful to infer component characteristics, such as waveguide-resonator coupling, loss, quality factor, etc., at multiple locations, without the constraint of input/output couplers. Here, we demonstrate the benefit of high dynamic range microscope imaging for a silicon coupled microresonator device.

© 2012 Optical Society of America

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