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Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Editor: Alan E. Willner
  • Vol. 37, Iss. 22 — Nov. 15, 2012
  • pp: 4765–4767

Spectral characteristics of quantum-cascade laser operating at 10.6 μm wavelength for a seed application in laser-produced-plasma extreme UV source

Krzysztof M. Nowak, Takeshi Ohta, Takashi Suganuma, Toshio Yokotsuka, Junichi Fujimoto, Hakaru Mizoguchi, and Akira Endo  »View Author Affiliations


Optics Letters, Vol. 37, Issue 22, pp. 4765-4767 (2012)
http://dx.doi.org/10.1364/OL.37.004765


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Abstract

In this Letter, we investigate, for the first time to our knowledge, the spectral properties of a quantum-cascade laser (QCL) from a point of view of a new application as a laser seeder for a nanosecond-pulse high-repetition frequency CO2 laser operating at 10.6 μm wavelength. The motivation for this work is a renewed interest in such a pulse format and wavelength driven by a development of extreme UV (EUV) laser-produced-plasma (LPP) sources. These sources use pulsed multikilowatt CO2 lasers to drive the EUV-emitting plasmas. Basic spectral performance characteristics of a custom-made QCL chip are measured, such as tuning range and chirp rate. The QCL is shown to have all essential qualities of a robust seed source for a high-repetition nanosecond-pulsed CO2 laser required by EUV LPP sources.

© 2012 Optical Society of America

OCIS Codes
(140.0140) Lasers and laser optics : Lasers and laser optics
(140.3470) Lasers and laser optics : Lasers, carbon dioxide
(140.4130) Lasers and laser optics : Molecular gas lasers
(140.3538) Lasers and laser optics : Lasers, pulsed
(140.5965) Lasers and laser optics : Semiconductor lasers, quantum cascade

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: August 30, 2012
Manuscript Accepted: October 3, 2012
Published: November 14, 2012

Citation
Krzysztof M. Nowak, Takeshi Ohta, Takashi Suganuma, Toshio Yokotsuka, Junichi Fujimoto, Hakaru Mizoguchi, and Akira Endo, "Spectral characteristics of quantum-cascade laser operating at 10.6 μm wavelength for a seed application in laser-produced-plasma extreme UV source," Opt. Lett. 37, 4765-4767 (2012)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-22-4765


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